EATON CORPORATION 6-Y-41324102-MEQ
时间：2022-07-13 09:09:54
我们的优势是欧美进口备件配件，所有进口的冷门的停产的或者你们找不到
的产品都可以来找我！
美国西门子ITE全系列、EATON电机 断路器 接触器 变压器 、 GE电气 断路
器 接触器 变压器 、 Cutler-Hammer（卡特拉-汉莫）、艾默生电机、PQ、
VERSA 这些品牌我们价格都很美好。
欢迎前来询价！
厦门纪扬科技有限公司是一家以工业自动化为主营，融科、工、贸于一体，
专业从*工业自动化工程项目设计、安装、调试等服务和*销售各类进口**
电气及自动化产品的民营高新技术企业。综合型的工程技术服务型单位，是
国内专业的电气产品分销商及工业自动化系统集成商。
具体专业信息请加微信，手机与微信同号， 袁经理 18250824218
主营：世界知名品牌的PLC 、DCS 系统备件 模块
①Allen-Bradley(美国AB)系列产品》
②Schneider(施耐德电气)系列产品》
③General electric(通用电气)系列产品》
④Westinghouse（美国西屋）系列产品》
⑤SIEMENS(西门子系列产品)》
⑥销售ABB Robots. FANUC Robots、YASKAWA Robots、KUKA Robots、Mitsubishi Robots、OTC Robots、Panasonic Robots、MOTOMAN Robots。
⑦estinghouse（西屋）： OVATION系统、WDPF系统、MAX1000系统备件。
⑧Invensys Foxboro（福克斯波罗）：I/A Series系统，FBM（现场输入/输出模块）顺序控制、梯形 逻辑控制、事故追忆处理、数模转换、输入/输出信号处理、数据通信及处理等。Invensys Triconex: 冗余容错控制系统、基于三重模件冗余（TMR）结构的zui现代化的容错控制器。
⑨Siemens(西门子)：Siemens MOORE， Siemens Simatic C1，Siemens数控系统等。
⑩Bosch Rexroth（博世力士乐）：Indramat，I/O模块,PLC控制器,驱动模块等。
Systems
LAM A6 DSiE
LAM A6 9400DFM
LAM A6 9600DFM
LAM 9600SE
LAM 9600SE II
Etcher Inner Gate Valve Drive 853-012200-002
2 Outer Gate Assy 853-012350-002
3 HARMONIC ARM DRIVE ASSEMBLY 853-012123-001
4 MONITOR ASSY 852-017500-003
5 Wafer Shuttle assy 853-012550-001
6 SEAL PLATE? 853-020936-002
7 BRAKE,GAP,ASSY 853-011141-003
8 UPPER ARM ASSEMBLY 853-012100-001
9 HARD DRIVE
10 WAFER HANDLER 715-130080-008
11 End Effector 715-130092-008
12 TRANSbbbbER & CAP 853-017370-001
13 TWIN FAN ASSY 853-017335-101
14 STEPPER MOTOR MOTHER BOARD 810-17010-001
15 INTERFACE PCB 044-612
16 PCB 810-017075-003
17 FORCE COMPUTERS PCB 810-017034-300
18 FORCE COMPUTERS PCB 810-017035-001
19 ASSEMBLY HARD DRIVE, IDE W/CONTROLLER 853-190023-001
20 INTERFACE PCB/ORBITAL GAS BOX PCB 810-017074
21 SOLENOID INTERLOCK BOARD/SOLENOID INTLK PCB 810-17004-001
22 STEPPER MOTOR DRIVER BOARD 810-017016-001
23 WELDMENT 839-011237-001
24 ASSY GAP DRIVE PROTECTOR 853-011168
25 Wafer Shuttle assy 853-012550-001
26 NOISE FILTER ZCAT2035-1330 037-000909-1
27 SOLENOID INTERLOCK BOARD 810-17004-001
28 NOISE FILTER TRCN-40-27-15 037-001122-1
29 DOMED ELECTRODE LEVELING 515-011835-001
30 PLATE BAFFLE UPPER 8.3 715-011912-083
31 COVER BELL 1D10-402315-11
32 OXA UL 805
33 UPPER COOLING RING 853-011555-001
34 LAM COOLING RING LOWER ELECTRODE 715-011626-001
35 14021T-93812
36 JIG P-PIN SHAFT 1D10-303003-11
37 ASSY GAP DR MOT PTCTR & B/O 853-011168-002
38 PUMP 853-013542-002-1
39 PCB ASSY DUAL DC MTR 233-2974-29
40 CHAMBER GARD WG3D228R2
41 MPS-4/ASSY GAP DRIVE PROTECTOR 853-011168-001
42 RETAINER bbbbbb 715-011039-001
43 CVP CLASS BC/RF SWITCH BOX 853-017163-001
44 RESISTOR BANK ?
45 CHILLER RESISTIVITY 810-025369-002
46 OUTER GATE ASSY 853-012350-002
47 CHAMBER RIM ?
48 CHAMBER LID 715-11035-001
49 CHAMBER 715-011002-002
50 Jig bell 1D10-402315-11
51 Plate baffle Lower 715-011913-555
52 Emflon filter MDY2230FTEH11
53 ATMI Smartprobe 512760-05
54 ATMI Dispencer 3334764
55 Tylan General pressure guage CDLS-21S06-EMC
56 ELECTROINC MODULE TRK2/5
57 ELECTROINC MODULE NO NUMBER
58 COHU CAMERA POWER UNIT 6712-2000/0000
59 WAFER LOADERS Y7603203
60 PNEUMATIC CONTROOL UNIT Y7654000
61 MONITOR 38-C34DND-01
62 WAFER DISPENSER EMA 54-010633 A 0501
63 WAFER DISPENSER 18-010698
718-094756-081 1 oem new
715-011912-083 plate baffle upper 2 oem new
715-28554-002 ESC plate 1 oem used
715-011531-009 Electrode Al , Anodized 1 oem new
LAM Rebbbbbb 853-012350-002 Outer Gate Assy 6
LAM Rebbbbbb 853-012123-001 HARMONIC ARM DRIVE ASSEMBLY 6
LAM Rebbbbbb 852-017500-003 MONITOR ASSY 2
LAM Rebbbbbb 853-012550-001 Wafer Shuttle assy 4
LAM Rebbbbbb 853-020936-002 SEAL PLATE? 3
LAM Rebbbbbb 853-011141-003 BRAKE,GAP,ASSY 4
LAM Rebbbbbb 853-012100-001 UPPER ARM ASSEMBLY 4
LAM Rebbbbbb 715-130080-008 WAFER HANDLER 3
LAM Rebbbbbb 715-130092-008 End Effector 3
LAM Rebbbbbb 853-017370-001 TRANSbbbbER & CAP 2
LAM Rebbbbbb 853-017335-101 TWIN FAN ASSY 4
LAM Rebbbbbb 810-17010-001 STEPPER MOTOR MOTHER BOARD 4
LAM Rebbbbbb 044-612 INTERFACE PCB 2
LAM Rebbbbbb 810-017075-003 PCB 4
LAM Rebbbbbb 810-017034-300 FORCE COMPUTERS PCB 2
LAM Rebbbbbb 810-017035-001 FORCE COMPUTERS PCB 3
LAM Rebbbbbb 853-190023-001 ASSEMBLY HARD DRIVE, IDE W/CONTROLLER 2
LAM Rebbbbbb 810-017074 INTERFACE PCB/ORBITAL GAS BOX PCB 1
LAM Rebbbbbb 810-17004-001 SOLENOID INTERLOCK BOARD/SOLENOID INTLK PCB 2
LAM Rebbbbbb 810-017016-001 STEPPER MOTOR DRIVER BOARD 28
LAM Rebbbbbb 853-011168 ASSY GAP DRIVE PROTECTOR 4
LAM Rebbbbbb 853-012550-001 Wafer Shuttle assy 1
LAM Rebbbbbb 037-000909-1 NOISE FILTER ZCAT2035-1330 1
LAM Rebbbbbb 810-17004-001 SOLENOID INTERLOCK BOARD 1
LAM Rebbbbbb 037-001122-1 NOISE FILTER TRCN-40-27-15 1
LAM Rebbbbbb 515-011835-001 DOMED ELECTRODE LEVELING 1
LAM Rebbbbbb 715-011912-083 PLATE BAFFLE UPPER 8.3 6
LAM Rebbbbbb 1D10-402315-11 COVER BELL 4
LAM Rebbbbbb OXA UL 805 2
LAM Rebbbbbb 853-011555-001 UPPER COOLING RING 1
LAM Rebbbbbb 715-011626-001 LAM COOLING RING LOWER ELECTRODE 1
LAM Rebbbbbb 14021T-93812 1
LAM Rebbbbbb 1D10-303003-11 JIG P-PIN SHAFT 1
LAM Rebbbbbb 853-011168-002 ASSY GAP DR MOT PTCTR & B/O 1
LAM Rebbbbbb 853-013542-002-1 PUMP 2
LAM Rebbbbbb 233-2974-29 PCB ASSY DUAL DC MTR 1
LAM Rebbbbbb WG3D228R2 CHAMBER GARD 3
LAM Rebbbbbb 853-011168-001 MPS-4/ASSY GAP DRIVE PROTECTOR 1
LAM Rebbbbbb 715-011039-001 RETAINER bbbbbb 1
LAM Rebbbbbb 853-017163-001 CVP CLASS BC/RF SWITCH BOX 2
LAM Rebbbbbb ? RESISTOR BANK 1
LAM Rebbbbbb 810-025369-002 CHILLER RESISTIVITY 1
LAM Rebbbbbb 853-012350-002 OUTER GATE ASSY 1
LAM Rebbbbbb 715-011002-002 CHAMBER 1
LAM Rebbbbbb 1D10-402315-11 Jig bell 2
LAM Rebbbbbb 715-011913-555 Plate baffle Lower 1
LAM Rebbbbbb MDY2230FTEH11 Emflon filter 1
LAM Rebbbbbb 512760-05 ATMI Smartprobe 8 LAM 4499H-004
LAM 713-011203-001
LAM 713-011205-001
LAM 713-011585-004(R1)
LAM 713-100178-001
LAM 713-100178-001
LAM 713-100197-001
LAM 713-100197-001
LAM 713-100197-002
LAM 713-330504-082
LAM 715-011492-008
LAM 715-011535-001
LAM 715-011640-006
LAM 715-011905-001
LAM 715-011909-001
LAM 715-011912-083
LAM 715-028608-161
LAM 715-028626-002
LAM 715-028627-002
LAM 715-030136-003
LAM 715-030320-001
LAM 715-031450-003
LAM 715-031518-001
LAM 715-031518-001
LAM 715-031522-001
LAM 715-140124-001-A
LAM 715-140125-001-A
LAM 715-140126-001-A
LAM 715-330087-001
LAM 715-330092-002
LAM 715-330133-001
LAM 715-330135-001
LAM 715-330135-001
LAM 715-330135-001
LAM 715-330188-001
LAM 715-330825-004
LAM 715-330825-004
LAM 715-330825-004
LAM 715-330825-005
LAM 715-330825-005
LAM 715-330825-006
LAM 715-330825-007
LAM 715-330915-001
LAM 715-330987-001
LAM 715-330987-001
LAM 715-350036-001
LAM 715-443130-001
LAM 716-011009-001
LAM 716-011009-001
LAM 716-011009-001
LAM 716-011009-001
LAM 716-011057-002
LAM 716-011427-001
LAM 716-011493-001
LAM 716-011510-001
LAM 716-011533-001
LAM 716-011540-001
LAM 716-011543-003
LAM 716-011564-002
LAM 716-011570-001
LAM 716-011585-004(R1)
LAM 716-011638-008
LAM 716-011638-008
LAM 716-011923-001
LAM 716-011923-001
LAM 716-018527-427
LAM 716-018537-428
LAM 716-020904-016
LAM 716-020904-018
LAM 716-021323-001
LAM 716-028123-001
LAM 716-028123-002
LAM 716-028454-012
LAM 716-028454-012
LAM 716-028454-012
LAM 716-028454-012
LAM 716-028454-015
LAM 716-028553-104
LAM 716-028721-281
LAM 716-028721-281
LAM 716-028721-288
LAM 716-028721-288
LAM 716-028721-288
LAM 716-028722-161
LAM 716-030135-001
LAM 716-030140-003
LAM 716-031052-001
LAM 716-031052-001
LAM 716-031453-002
LAM 716-031453-002
LAM 716-032339-001
LAM 716-051195-005
LAM 716-100180-003
LAM 716-100180-003
LAM 716-100180-003
LAM 716-140069-001
LAM 716-140069-001
LAM 716-140118-001
LAM 716-140139-008
LAM 716-140139-008
LAM 716-140139-008
LAM 716-140139-008
LAM 716-140139-211
LAM 716-140139-211
LAM 716-330045-001
LAM 716-330045-002
LAM 716-330045-012
LAM 716-330121-001
LAM 716-330121-001
LAM 716-330121-001
LAM 716-330121-001(R1)
LAM 716-330121-004
LAM 716-330121-201
LAM 716-330122-002
LAM 716-330135-001
LAM 716-330191-082
LAM 716-330394-002
LAM 716-330504-061(R1)
LAM 716-330504-081
LAM 716-330760-002
LAM 716-330890-001
LAM 716-330890-051
LAM 716-330892-005(=007)
LAM 716-330892-007
LAM 716-330915-001
LAM 716-331097-001
LAM 716-440345-288
LAM 716-440386-228
LAM 716-443083-004
LAM 716-443084-003
LAM 716-443086-308
LAM 716-443090-002
LAM 716-443129-001
LAM 718-094523-282
LAM 734-061978-274
LAM 734-061978-453
LAM 734-093789-001
LAM 839-011907-001
LAM 839-011907-001
LAM 839-011907-111
LAM 839-011908-100
LAM 713-028487-001
LAM 715-011204-002
LAM 715-011531-008
LAM 715-011531-009
LAM 715-011531-010
LAM 715-011531-011
LAM 715-011531-014
LAM 715-011531-102
LAM 715-011532-006
LAM 715-011746-151
LAM 715-011746-161
LAM 715-018991-206
LAM 715-018991-428
LAM 715-028486-002
LAM 715-028552-001
LAM 715-028628-XXX
LAM 715-028629-002
LAM 715-030136-003
LAM 715-031454-004
LAM 715-140080-001
LAM 715-140081-001
LAM 715-330106-104
LAM 715-330106-104R
LAM 715-330825-007R
LAM 715-330984-001
LAM 716-011563-161
LAM 716-011564-001
LAM 716-011564-003
LAM 716-011580-161
LAM 716-021717-XXX
LAM 716-028028-003
LAM 716-028123-002
LAM 716-028249-064
LAM 716-028668-XXX (-281)
LAM 716-028678-XXX (-251)
LAM 716-028688-XXX (-251)LAM 715-801916-803
LAM 666-032460-014
LAM 796-094747-001
LAM 734-021886-002
LAM 715-330394-010
LAM 852-017500-003
LAM 716-008802-001
LAM 715-42859-001
LAM 799-100332-001
LAM 853-140013-001-1-230S
LAM 715-011531-016
LAM 715-002542-001
LAM 715-028626-104
LAM 849-099343-003
LAM 710-039320-00
LAM 71-0002-025
LAM 670-093052-063
LAM 810-028298-007
LAM 715-801021-339
LAM 715-011801-001
LAM 754-095240-016
LAM 246875-024 720-009530-024
LAM 672-001351-016
LAM 839-443215-001
LAM 853-190023-001
LAM 13-0072-150
LAM 668-540266-001
LAM 768-098511-001
LAM 714-140259-001
LAM 853-015516-004
LAM 799-130053-004
LAM 853-190074-001
LAM 670-006780-012
LAM 716-017112-002
LAM 716-011638-006
LAM 715-801021-801
LAM 713-011415-001
LAM 645-098573-001
LAM 853-017366-001
LAM 856-380309-600
LAM 853-495526-001
LAM 734-007355-001
LAM A746-006598-001
LAM 715-006719-001
LAM 853-017955-002
LAM 716-066539-008
LAM 810-17031-003
LAM 715-0111173-001
LAM 715-013832-001
LAM 716-330167-264
LAM 715-098591-001
LAM 766-009866-040
LAM 796-000714-001
LAM 715-002417-001
LAM 810-492740-001
LAM 853-017946-002
LAM 920-250556-001
LAM 853-034120-001
LAM 716-331142-015
LAM 853-012350-002-D
LAM 853-017816-020
LAM 716-022024-002
LAM 713-011203-001
LAM 853-177892-002
LAM 716-330045-216
LAM 839-014411-101
LAM 715-046844-011
LAM 853-075621-200
LAM 849-030363-601
LAM 839-013517-001
LAM 853-017633-003
LAM 853-402337-001
LAM 810-017061-001
LAM 515-012168-004
LAM 839-014578-101-A
LAM 715-011640-004
LAM 714-390178-001
LAM 810-017003-002
LAM 790-130044-205
LAM 668-007083-003
LAM 716-069688-040
LAM 734-061280-132
LAM 716-250972-001
LAM 715-003919-001
LAM 715-11626-001
LAM 853-002103-001
LAM 853-020936-002
LAM 853-170245-002
LAM 715-11059-001
LAM 715-220249-001
LAM 839-052158-022
LAM 775-008331-001
LAM 716-028492-002
LAM 778-900046-323
LAM 860-010168-001
LAM 720-009532-010
LAM 715-012268-001
LAM 716-011629-006
LAM 853-331019-001
LAM 715-066095-202
LAM 668-006724-006
LAM 715-012316-001
LAM 677-009090-001
LAM 715-011912-083
LAM 853-013542-002-1
LAM 715-802530-001
LAM 853-011594-206
LAM 716-442005-001
LAM 778-900046-001
LAM 853-017936-002
LAM 853-190364-001
LAM 853-190203-010
LAM 810-028295-161
LAM 714-000546-001
LAM 715-007939-002
LAM 715-802381-104
LAM 716-460417-001
LAM 713-010221-001
LAM 668-003032-005
LAM 734-006655-001
LAM 718-803179-001
LAM 713-040420-004
LAM 839-170110-001
LAM 715-140144-002
LAM 716-067739-105
LAM 713-810529-001
LAM 810-077365-001
LAM 853-032945-001
LAM 716-330061-006
LAM 726-800644-001
LAM 715-011902-001
LAM 810-9281-1
LAM 724-S012529-001-00
LAM 684-019144-304
LAM 723-2377-1
LAM 853-001341-004
LAM 678-000815-001
LAM 715-027638-814
LAM 715-000103-001
LAM 715-160164-003
LAM 716-112640-012-D
LAM 714-412399-001
LAM 853-L017633-009
LAM 713-071820-004
LAM 713-043116-001
LAM 853-495527-002
LAM 851-8226-008
LAM 715-0015-001
LAM G17-08946-03
LAM 715-11001-002
LAM 853-17643-001
LAM 715-05865-001
LAM 716-11533-001
LAM 853-04106-001
LAM 715-00831-001
LAM 839-013913-001
LAM 714-802364-004
LAM 853-330160-001
LAM 515-009849-001
LAM 716-028688-261
LAM 713-071084-002
LAM 715-222451-003
LAM 920-062683-020
LAM 713-071820-002
LAM 852-012525-001
LAM 713-071880-004
LAM 715-410118-002
LAM 500-102376-003
LAM 839-000865-001
LAM 716-011563-168
LAM 518-410240-001
LAM 713-071872-004
LAM 853-001198-003
LAM 716-012639-125
LAM 713-072151-001
LAM 734-092358-001
LAM 715-000028-001
LAM 839-054692-001
LAM 734-007356-001
LAM 839-016641-002
LAM 713-052663-001
LAM 720-000940-014
LAM 655-612790-000
LAM 715-071646-002
LAM 716-026652-832
LAM 713-071670-001
LAM 734-000981-001
LAM 715-042524-001
LAM 734-091228-200
LAM 750-689383-000
LAM 853-001198-002
LAM 810-190549-003
LAM 715-052336-001
LAM 715-011597-001
LAM 853-017807-001
LAM 713-026330-004
LAM 713-140433-001
LAM 920-091519-005
LAM 839-074635-004
LAM 744-093789-001
LAM 720-000930-032
LAM 734-090745-001
LAM 715-011531-011
LAM 716-006753-001
LAM PWB115656-001
LAM 600749
LAM 721-000976-001
LAM 661-006743-001
LAM 676-000504-003
LAM 853-034279-102
LAM 853-032908-608
LAM 853-067076-011
LAM 839-014706-001-A
LAM 715-052343-001
LAM 857-020295-104
LAM 849-432144-001
LAM 715-011522-022
LAM 716-140207-001
LAM 810-802799-010
LAM 716-002483-188
LAM 853-370681-001
LAM 714-054679-001
LAM 714-002921-010
LAM 720-000930-004
LAM 716-021491-001
LAM 853-193702-003
LAM 714-017237-002
LAM 713-071532-003
LAM S31A-CB-006-Q
LAM 715-440547-001
LAM 715-802392-001
LAM 839-360139-001
LAM 714-053320-001
LAM 713-073096-001
LAM 853-350021-001
LAM 715-002031-001
LAM 853-490993-048
LAM 715-410118-001
LAM 746-000218-001
LAM 715-011913-501
LAM 714-054649-001 Lam Rebbbbbb 716-011540-001
LAM 716-001163-001
LAM 920-061486-002
LAM 670-060870-002 025757 LOWER ELECTRODE, INS. RING 100 MM
602120 CERAMIC PIN
2100469 bbbbbb QUARTZ
2301853 LOWER INSULATOR RING CERAMIC
713-011203-001 COVER 90 DEG. ENTRANCE LOADLOCK
713-011205-001 COVER 180 DEG. EXIT LOADLOCK
713-018624-302 RING FOCUS 6"
713-028123-001 RING FILLER TEFLON SPACER
713-028487-001 RING CONFINEMENT, VESPEL
713-540183-002 RING UPPER PEEK
713-540184-004 RING UPPER PEEK
715-011531-011 ELECTRODE ALUMINUM ANODIZED
715-011531-016 ELECTRODE ALUMINUM ANODIZED
715-011905-001 PLATE, UPPER ELECTRODE SILICON 6"
715-030319-001 COVER, NUT
715-443178-300 R,EDGE,HOT-300MM Al, 300mm
716-000941-001 PLATE PLASMA DISTRIBUTION
716-003543-006 EDGE RING SILICON, 300mm, EXELAN
716-004655-001 RING QUARTZ UPPER
716-007136-002 UPPER QUARTZ RING HPT
716-007136-003 (S) UPPER RING HPT
716-008645-001 (S) COVER RING HPT
716-011009-001 bbbbbb,QUARTZ
716-011036-001 RING,FILLER ORIFICE,ALUMINA
716-011057-002 RING,FILLER UPPER,ALUMINA
716-011427-001 DISK QUARTZ MECHANICAL POLISH
716-011493-001 SPACER,QUARTZ,MODULE,<NSIR>
716-011533-001 bbbbbb,QUARTZ,<NSIR>
716-011536-001 RING INSULATOR-UPPER ELECTRODE
716-011540-001 RING, FACE, UPPER ELECTRODE (Al)
716-011543-001 PLATE,WAFER CLAMP ATTACHMENT
716-011563-061 INNER RING, 6" SHADOW
716-011563-161 PLT,WAFER CLAMP 6 IN,DOMED
716-011563-261 PLT,WAFER CLAMP 6 IN,DOMED
716-011570-001 FILLER,ORIFICE,WAFER
716-011580-161 PLATE,WAFER CLAMP 6 IN (1.5MM
716-011623-001 RING CLAMP, ESC 6"
716-011624-001 RING, INSULATOR, LOWER ELECTRODE
716-011624-005 RING INSULATOR LOWER ELECTRODE
716-011624-007 RING, INSULATOR, LOWER ELECTRODE 716-011764-281 PLATE, WAFER, CLAMP, 8" .035 DOME
716-011830-005 RING,FOCUS,ALUMINA,WAFER CLAMP
716-011830-006 RING,FOCUS,ALUMINA,WAFER CLAMP
716-011830-008 RING, FOCUS (ALUMINA) WAFER CLAMP
716-011904-001 RING BACKING, UPPER ELECTRODE 6", GRAPHITE
716-011922-001 RING, ELECTRODE CLAMP 6" ELECTRODE
716-011923-001 PLATE,WAFER CLAMP ATTACHMENT
716-012639-014 NOZ,GAS ROL-1 CTR. HOLE, QTZ 2300 bbbbL, 300mm
716-014316-001 PLT. MTG, 200mm COIL, ALUMINA, 2300
716-016394-001 (S) CONFINEMENT RING HPT
716-020904-016 RING,EDGE FOCUS,LOWER WAFER
716-020904-018 RING, EDGE FOCUS, LOWER WAFER CLAMP
716-020905-001 RING,FILLER,LOWER WAFER CLAMP
716-020906-161 CLAMP RING DOMED W/PINS
716-020931-030 PLUNGER, 1/4 TURN
716-021323-001 FUNNEL,QUARTZ,STRIPPER
716-021323-002 FUNNEL QTZ PS MODULE
716-021491-001 SPACER,DIRECTOR,PROCESS
716-021717-002 JAR,BELL,SLEEVE,ISOTROPIC ETCH
716-021843-001 JAR,BELL,BASE,ISOTROPIC ETCH
716-025916-001 PLUG ESC WAFER PROBE, 2300
716-028028-004 RING,ELECTRODE CLAMP(6 IN
716-028123-002 RING, FILLER (CERAMIC)
716-028249-061 RING,FOCUS,JEIDA 6"
716-028414-015 FOCUS RING 5"
716-028454-012 DISK, QUARTZ, <NSIR>
716-028668-151 PLT,TOP WAFER CLAMP,DOMED SHADOW 1.5mm COV. W/PINS
716-028668-261 PLT,TOP WAFER CLAMP,DOMED SHADOW
716-028668-268 PLT,TOP WAFER CLAMP,DOMED SHADOW
716-028668-281 PLT, TOP WAFER CLAMP, DOMED SHADOW
716-028678-261 CLAMP, CERAMIC, 6" 4500
716-028688-581 PLT, BOTTOM WAFER CLAMP, DOMED
716-028721-261 PLT,BOTTOM WAFER CLAMP,DOMED
716-028721-268 PLT, BOTTOM WAFER CLAMP, DOMED
716-028721-281 PLT,BOTTOM WAFER CLAMP,DOMED
716-028722-161 PLT,BOTTOM WAFER CLAMP,DOMED
716-028725-161 PLT, BOTTOM WAFER CLAMP DOMED
716-028761-241 PLATE TOP WAFER CLAMP 4", 2.25 MM COV.
716-028768-001 LOWER ELECTRODE 6"
716-030135-001 RING,EDGE,8" ELECTROSTATIC
716-030136-001 RING EDGE 6' WITH FLAT
716-030136-016 EDGE RING CERAMIC
716-031052-001 WDO,QTZ,HTD,ENDPOINT,<NSIR>
716-031052-002 bbbbbb QUARTZ HTD ENDPOINT
716-031453-001 RING,FILLER,LOWER CHAMBER
716-031453-002 RING, FILLER, LOWER CHAMBER, ESC
716-038612-002 PIN, PICK UP DC BIAS SiC
716-038657-418 COVER, FOCUS RING, Si3N4, ESC 8" 716-074512-002 PIN LIFTER-LOADLOCK, <NSIR>
716-077758-016 RING, EDGE FOCUS ORIFICE, CONMBO,6in, L
716-140118-001 RING,FOCUS,ESC,8 IN
716-140125-100 BAFFLE LOWER OF THREE SIC
716-140139-001 RING HOT EDGE CERAMIC
716-140139-008 RING,HOT EDGE,HIGH WALL,ESC
716-140139-211 RING,HOT EDGE,HIGH WALL,ESC 8"
716-140141-001 RING HOT EDGE 15 JDA-JDA 6",CERAMIC
716-140141-261 RING HOT EDGE 15 JDA-JDA 6",<NSIR>
716-140163-001 RING HOT EDGE 15 DEG ESC CERAMIC
716-140163-261 RING,HOT EDGE,15 DEG.ESC STD
716-140236-002 RING,CONFINEMENT,MODULAR,QTZ
716-140236-003 RING CONFINEMENT MODULAR QUARTZ
716-140236-061 RING, CONFINEMENT, MODULAR, QUARTZ
716-140236-062 RING,CONFINEMENT,MODULAR,QUARTZ
716-140236-803 RING CONFINEMENT MODULAR QUARTZ - KIT H
716-140239-001 RING HOT EDGE
716-140427-001 RING,HOT EDGE,15,NTCH,ESC,STD
716-140432-001 RING, UPPER, KEYED
716-140432-002 INSERT RING, UPPER, KEYED
716-140432-004 UPPER KEYED
716-140432-061 RING, UPPER, KEYED, 6"
716-140432-804 INSERT RING, UPPER, KEYED - KIT I
716-160255-002 BELL JAR SLEEVE
716-249040-001 RING,FOCUS,ESC,150MM
716-250463-001 LINER CERAMIC
716-250514-001 CLAMP SHADOW CER 45, 150MM
716-252749-001 HEATER LINER RING
716-252750-001 FOCUS RING ADAPTOR
716-252855-001 VIEW PORT
716-252856-001 TRANSFER PART
716-252857-001 ESC ARM COVER
716-330045-001 RING EDGE 8" ESC MAJ. FLAT
716-330045-002 RING EDGE 8" MAJ. FLAT ESC, VAR. GAP
716-330045-004 RING EDGE 8" ESC
716-330045-261 RING EDGE 6" FLAT ESC.
716-330045-281 RING EDGE 8" NCH, SHDV R-ESC
716-330121-001 bbbbbb,RF,SHAPED CERAMIC,FIXED
716-330121-006 bbbbbb,RF
716-330121-016 bbbbbb RF SHAPED, CERAMIC
716-330121-201 bbbbbb, RF, SHAPED,CERAMIC,FIXED
716-330122-003 PLATE, TOP CERAMIC FIXED GAP WITH SHIELD
716-330162-002 RING,FILLER,B.A.C.
716-330167-141 RING,CLAMP,BOTTOM ACTUATOR
716-330167-161 RING,CLAMP,BOTTOM ACTUATOR
716-330167-181 RING,CLAMP,BOTTOM,ACTUATOR
716-330167-261 RING, CLAMP, BOTTOM ACTUATOR
716-330167-288 RING,CLAMP,BOTTOM ACTUATOR
716-330355-001 bbbbbb, QTZ, HTD ENDPOINT, <NSIR>
716-330355-002 bbbbbb QUARTZ DUAL HEATED
716-044035-001 bbbbbb QUARTZ 716-330504-064 RING FOCUS, 6" ESC, GUARD RING
716-330504-065 RING FOCUS, 6" ESC, GUARD RING
716-330504-081 RING, FOCUS, 8" ESC, GUARD RING
716-330760-003 RING, SHADOW, 2.25mm COVERAGE
716-330830-164 RING EDGE 6" CERAMIC
716-330890-001 RING, CNTMNT, RCTN CHAMBER 8"
716-330890-006 RING, CNTMNT, RCTN CHAMBER 6"
716-330891-002 bbbbbb,TCP,QUARTZ,9600XX
716-330892-007 PLATE GAS DISTRIBUTION, 21 HOLES
716-330915-001 INSULATOR, ESC
716-330915-003 SLV, INSULATOR ESC LOW-CAP
716-331051-002 UNI RING
716-331088-001 RING,EDGE 8",ELECTROSTATIC, QUARTZ
716-331089-001 RING EDGE, 8" ES, BOT, CER
716-331099-001 R,EDGE,6" ESC,FL,TOP,QTZ
716-331128-001 bbbbbb SAPPHIRE
716-331142-001 RING EDGE TOP WIDE
716-331142-302 RING EDGE,TP 1mm,STP-300mm
716-331157-013 DISK INTERFEROMETER TOP GAS
716-331157-014 DISC INTERFEROMETER, FIREPOLISHED
716-331157-015 DISC INTERFEROMETER
716-402452-002 (S) COUPLING RING HPT
716-402452-003 COUPLING RING HPT
716-440054-061 RING, FOCUS 6" ESC
716-440274-002 bbbbbb, AlN 1370 AI
716-440345-261 PLT BOTTOM WAFER CLAMP, DOMED
716-441044-007 PLATE PLASMA DISTRIBUTION
716-441523-001 INSULATOR ELECTRODE LOWER, ESC
716-443083-004 CONFINEMENT RING
716-443084-003 CONFINEMENT RING
716-443086-301 HOT EDGE RING
716-443086-401 EDGE RING SILICON
716-443090-002 RING,QUARTZ,UPPER
716-443090-202 UPPER RING, SiC
716-443179-102 RING EDGE BASE
716-443217-002 RING CLAMP UPPER SIC
716-443234-002 (S) INNER FOCUS RING HPT
716-460215-001 RING FOCUS 6" STP CHAMBER
716-460215-002 RING, FOCUS, 6 IN STRIP CHAMBER
716-460216-002 RING, FOCUS 8", STP CHMBR
716-460758-001 LNR, VIEWPORT HTD LNR TCP OXD
716-460785-002 PLATE SHOWER HEAD 10 HOLES SiC GDP
716-460875-002 INSULATOR
716-460915-001 INNER COVER, COMPOSITE FOCUS RING SiC 6" SEMI
716-460915-002 OUTER COVER, COMPOSITE FOCUS RING Si3N4 6" SEMI
716-460916-001 INNER COVER, COMPOSITE FOCUS RING SiC 8" 716-461194-002 INNER COVER COMPOSITEFOCUS RING, SiC 6" NO FLAT
716-540198-001 bbbbbb,FUSED SILICA
716-800952-001 BASE,FOCUS RING,SHIELDED 300MM
716-801140-002 LINER,QUARTZ,PLASMA CHAMBER,6"
716-801667-001 bbbbbb,QUARTZ
716-460916-002 OUTER COVER, COMPOSITE FOCUS RING Si3N4 8"
716-460953-001 INNER COVER, COMPOSITE FOCUS RING SiC 8" JEIDA
716-460953-002 OUTER COVER, COMPOSITE FOCUS RING Si3N4 8" JEIDA
716-461194-001 INNER COVER COMPOSITE FOCUS RING, Si3N4 6" NO FLAT
716-074512-001 PIN LIFTER-LOADLOCK
716-011638-006 RING, FOCUS, THIN EDGE
716-011638-008 RING,FOCUS,THIN EDGE Adjuster, Ceramic, Gas Plate 15-00043-02
CERAMIC INSULATOR GAS FEED 15-00475-00
Ring Heater Centering,Ceramic 15-00484-00 REV.C
SJIELD, HEATER, STRAP 2.00 15-00558-01
(U)SLEEVE HTR LEAD CERANIC 15-00558-01(U)
SHIELD HEATER LEAD 2.75" 15-00558-02
Sleeve Flanged AC Feedthru Ceramic 15-00578-00
CERAMIC KEYED BUSHING 15-00731-00
RING, INSULATOR,200MM 15-032503-00
FORK-FINGER 15-053394-01 REV.A
FORK-FINGER 15-053394-02 REV.A
FORK-FINGER 15-053394-03 REV.A
SLEEVE CERAMIC,FEEDTHRU,COVER 15-107698-00
NSULATOR,GAS DISTRIBUTION CVD-W 15-11606-00 REV.B
RING INSULATOR ANODE 15-118123-00
RING, GUARD, LTM, HDP300 15-150002-00 REV.D
INJECTOR,TUBE,CLN,SPEED 15-158185-00
BLADE(WTX TM ROBOT BLADE) 15-250449-00(S)
Plate, Fork Retainer, Bottom, 200mm, Ceramic 15-277463-00
CR INSERT NUT 15-287254-00
PIN,3SPD 15-298024-00
SPACER, DISK, PEDESTAL, 300MM 15-303364-00
NOVELLUS, CERAMIC FORK, C1-150MM 15-305056-00
PLATE,BOTTOM,CERAMIC,C1-150 15-305097-00
HOLDER,WAFER,MOER RING,C3 ALTUS 15-325718-00
Edge Ring 716-003686-188
INSULATOR RING 716-006721-001
RING FACE UPPER ELECTRODE 716-011540-001 REV.00
RING FOCUS ORIFICE COMBO-5" 716-011758-015 REV.G
Ring Edge BOT 200-300mm 716-026652-002
Domed Wafer Clamp 716-028678-245
RING EDGE8"ELECTROSTAIC NPTCHED 716-030135-001 REV A
bbbbL L QUARTZ TOP EDGE RING 716-031257-534 REV.D
DMF-P EDGE RING 716-031535-008
UPPER INSULATOR CENTER RING_BEBEL 716-059395-200
PIN LIFTER LOADLOCK 716-074512-002
TOP EDGE RING 716-077262-111(U1)
QTZ COVER RING SLOPE FOR FLEX GX 716-087943-892
QTZ COVER RING-FOR FLEX-GX 716-087943-913
COVER, QUARTZ INNER 5XX CER 13.5D 716-087943-913
RING CONTROL COND QTZ 05 SLOT 716-088516-807 REV.B
PRESSUER CONTROL RING,NO SLOT_FOR 716-088516-810
RING EDGE 8", NOTCH, ESC VAR GAP 716-330045-002
RING EDGE NON LANDED 8" NOTCHED 9600PTX 716-330045-281
TOP, CERAMIC, FXD GAP W/SHLD 716-330122-003
RING, FOCUS 8" ESC, GUARD RING 716-330504-081
NSUL ESC 9600XX 716-330915-001
R,UNIFIY,CUT-OUT,AS-FIRED 716-331051-002 REV.E3
RING,EDGE,TOP,WIDE 716-331142-007
FOCUS RING ESC INNE 8" 716-443129-001
CONFINEMENT BOTTOM 716-44383-003
CONFINEMENT TOP 716-44383-004
BAES FOCUS RING 300MM 716-800952-001 413-330504-082 RING FOCUS FLAT 9608 ETCH 9600 AL2O3 99.5% 8"
713-001585-004 GDP CAP SCREW ETCH 9600 ZrO2 + SUS 8"
713-028553-103-REV, COMFINEMENT RING CERAMIC ETCH RAINBOW 4528 Al2O3 99.5% 8"
716-005773-005 FOCUS RING ETCH TCP 9600 Al2O3 99.5% 5"
716-006721-001 INSULATOR RING ETCH Al2O3 99.5%
716-011057-002 RING FILLER UPPER Al2O3 99.5% 8"
716-011427-003 CERAMIC DISK ETCH Al2O3 99.5% 8"
716-011540-001 UPPER FACE RING Al2O3 99.5% 8"
716-011563-063 WAFER CLAMP 6INCH ETCH RAINBOW 4520 Al2O3 99.5% 6"
716-011563-151 UNIVERSAL CLAMP RING ETCH RAINBOW 4520 Al2O3 99.5% 5"
716-011563-161 WAFER CLAMP 6 INCH ETCH RAINBOW 4520 Al2O3 99.5% 6" 716-000941-001 Plate,Plasma Dist.
716-006446-001 DIFFUSER
716-006721-001 INSULATOR RING
716-006753-001 INSULATOR
716-007136-002 HPT UPPER QUARTZ RING
716-007136-010 RING, QTZ,UPPER HPT
716-008608-001 bbbbbb,Sapphire
716-008645-004 Confinement Ring, One Piece
716-011009-001 bbbbbb
716-011036-001 INSULATOR RING
716-011057-002 RING,FILLER,UPPER
716-011427-001 QUARTZ DISK
716-011505-001 DIFFUSER
716-011533-001 bbbbbb QUARTZ
716-011536-001 RING INSULATOR-UPPER ELECTRO
716-011540-001 RING,FACE-UPPER ELECTRODELAM 026182 Electrode, Upper, AL
2 LAM 2101363 WAFER CLAMP
3 LAM 2201679 Screw, Spring, Stainless Steel
4 LAM 2301700 Tube, Ceramic
5 LAM 2301856 Ring, Ceramic, ASIQ
6 LAM 2201679 SCREW, SPRING, STAINLESS STEEL
7 LAM 228-022-0241 CARTRIDGE, DEIONIZER, 10"
8 LAM 2301700 TUBE, CERAMIC
9 LAM 2301856 RING, CERAMIC, ASIQ
10 LAM 4C447 FRAME BLOWER MODEL: 4C447
11 LAM 5009100000 CLAMP, PLUNGER & RETAINER, CERAMIC (4420)
12 LAM 5009101000 SCREW, VENT, AL.
13 LAM 5009101001 SCREW, VENT, CERAMIC
14 LAM 5009106020 CLAMP, RETAINER, CERAMIC (RAINBOW 4420)
15 LAM 5009106034 ASSY, SPRING, PLUNGER, LAM
16 LAM 5009106067 CHAMBER, PLASMA, QUARTZ
17 LAM 5009106073 DISK, ALIGNMENT
18 LAM 5009106075 RING, COVER, QUARTZ
19 LAM 5009106084 SCREW, #6-32 X 5/8, SS
20 LAM 5009106106 KEY, 3/32 X 8.0 LG.
21 LAM 5009106127 PLUG, PIN, WAFER
22 LAM 5009106133 RING, CLAMP, AL, ASIQ
23 LAM 5009106134 WASHER, SS, 1/4", ASIQ
24 LAM 5009106135 SCREW, SPRING, STAINLESS, ASIQ
25 LAM 5009106137 SLEEVE, TEFLON, ASIQ
26 LAM 5009106138 E-CLIP, SS, ASIQ
27 LAM 5009106139 SCREW, SHOULDER, ASIQ
28 LAM 5009126001 INSULATOR, RING, LAM 490
29 LAM 5009176016 CAP, KEL-F, O.D. -0.370, I.D. -.280
30 LAM 5009176022 INSERT, PLUNGER
31 LAM 5009176028 DOOR, LOAD LOCK (ORIGINAL)
32 LAM 5009176034 CAP, THREADED, FEMALE, KEL-F
33 LAM 5009176035 PLUNGER, HOUSING, KEL-F
34 LAM 5009176036 SCREW, 10-32, KEL-F
35 LAM 5009176043 SCREW, KEL-F, FHSL, 6-32 X 5/8
36 LAM 5009176048 CAP, THREADED, FEMALE, KEL-F, #3/8-16
37 LAM 5009176056 GASKET, TEFLON
38 LAM 5009200001 COVER, SCREW, ELECTRODE, LOWER
39 LAM 515-093894-001 O-RING
40 LAM 600-000134-001 ASSY., CLAMP, RETAINER, &, PLUNGER
41 LAM 6005000003 KIT, PLUNGER ASSEMBLY, KEL-F
42 LAM 6005000009 KIT, PLUNGER, CERAMIC
43 LAM 6005000010 PUCKS, ALIGNMENT
44 LAM 6005000011 ASSY, PUCK, ALIGNMENT, 11"
45 LAM 6005000016 KIT, PM, PLUNGER, 9600
46 LAM 6005000019 KIT, CLEAN, CHAMBER, 9600
47 LAM 6005000031 KIT, PLUNGER, LONG, KEL-F
48 LAM 6005000046 ASSY, LIFT PIN, CARTRIDGE
49 LAM 6005000047 KIT, PM, RAINBOW, MODEL 4528
50 LAM 602120 ASSEMBLY, PIN, LIFT, WAFER
51 LAM 602258 SCREW, SHOULDER
52 LAM 601124 BAFFLE
53 LAM 601179 BAFFLE PLATE
54 LAM 601187 PLATE-DIFF, ANOD (100, 125, 150MM)
55 LAM 601224 DIFFUSER PLATE
56 LAM 602250 BAFFLE PLATE TOP
57 LAM 6150000015 KIT, SUB-ASSY., PM, ELECTRODE & LIFTER, LOWER
58 LAM 6150000018 KIT, SUB-ASSY., PM, HOUSING, CHAMBER, LOWER
59 LAM 6150000020 KIT, SUB-ASSY., PM, SPINNER, LIFTER
60 LAM 645-000217-001 MICRO SWITCH#311SM706-T
61 LAM 660-024637-026 RFDS
62 LAM 676-000504-003 MOTOR 12 VDC
63 LAM 713-000032-001 BUSHING, VESPEL, LARGE
64 LAM 713-000032-002 BUSHING, VESPEL, SMALL
65 LAM 713-002870-001 SLIT, bbbbbb, END POINT, TEFLON
66 LAM 713-004108-001 ANODE PLUG
67 LAM 713-008060-001 GAS FEED STANDOFF
68 LAM 713-011545-002 GUIDE, SPRING
69 LAM 713-011546-002 SLEEVE, PLUNGER GUIDE
70 LAM 713-011548-001 SLEEVE, PLUNGER GUIDE
71 LAM 713-011558-001 RING, ELECTRODE INSULATOR
72 LAM 713-011560-001 RING, SHROUD
73 LAM 713-011574-001 PLUNGER, WAFER CLAMP
74 LAM 713-011575-001 NUT, RETAINER
75 LAM 713-011576-001 ALIGNMENT PIN, CLAMP
76 LAM 713-011577-001 WASHER, CLAMP RETAINING
77 LAM 713-011578-001 SLEEVE, PLUNGER GUIDE
78 LAM 713-011578-003 SLEEVE, PLUNGER GUIDE
79 LAM 713-011579-001 GUIDE, PLUNGER
80 LAM 713-011584-001 PLUNGER, WAFER CLAMP
81 LAM 713-011585-001 COVER, CLAMP BOLT
82 LAM 713-011585-004 INSERT, TEFLON
83 LAM 713-011592-001 WASHER, KEL-F, O.D., -0.625, I.D. -0.200
84 LAM 713-011592-002 WASHER, KEL-F, O.D., -0.625, I.D. -0.240
85 LAM 713-011650-006 RING, FOCUS COMBO
86 LAM 713-011752-001 INSERT, 6-32 THREAD
87 LAM 713-011760-001 WASHER, EDGE, FOCUS, RING
88 LAM 713-011803-002 RING, ELECTRODE CLAMP
89 LAM 713-011926-001 CAP, BOLT ELEC.
90 LAM 713-011928-001 CAP BOLT ELECTRODE
91 LAM 713-011980-001 HOUSING, PLUNGER
92 LAM 713-018426-369 INSERT, VESPEL 6"
93 LAM 713-020801-001 SHLD, WATER, HEADLOAD AXIS
94 LAM 713-020911-102 PLUNGER, WAFER CLAMP, UPPER
95 LAM 713-021267-001 CLAMP, PIN HEAD
96 LAM 713-021268-001 CLAMP, PIN BASE
97 LAM 713-021310-001 bbbbbb P.S. MODULE
98 LAM 713-022442-001 LID, ENCLOSURE
99 LAM 713-022446-001 SHIELD SPLASH INNER
100 LAM 713-022447-001 SHIELD SPLASH OUTER
101 LAM 713-023568-001 LIP ENCLOSURE LID
102 LAM 713-023665-001 LID DRIP PAN
103 LAM 713-028281-001 CONFINEMENT RING
104 LAM 713-028485-001 BOLT, ELECTRODE RING CLAMP, KEL-F
105 LAM 713-028487-001 RING, CONFINEMENT, VESPEL
106 LAM 713-028553-001 CONFINEMENT RING
107 LAM 713-028553-002 CONFINEMENT RING
108 LAM 713-028553-103 RING, CONFINEMENT, VESPEL
109 LAM 713-098661-001 SLOTTED PAN
110 LAM 713-140214-001 GUIDE PIN, REV A
111 LAM 713-140214-001-A GUIDE PIN, REV A
112 LAM 713-140397-004 PIN, LOWER ELECTRODE, 6" 10-32 UNF
113 LAM 713-140397-005 PIN, LOWER ELECTRODE
114 LAM 713-140434-001 PIN, INDEX, RING, QTZ.
115 LAM 713-250585-001 HSG, ISOLATOR, RF
116 LAM 713-330153-003 Rod, Adjustable, Clamping, Vespel, 9600
117 LAM 713-330166-002 COVER, ROD, CLAMPING, B.A.C 9600
118 LAM 713-330311-001 CLIP, B.A.C, 9600
119 LAM 713-540183-002 BUSHING, LOWER, PEEK
120 LAM 713-540184-002 BUSHING, UPPER, PEEK
121 LAM 714-330982-001 2 MIL HARD ANODIZE WITH SEALANT
122 LAM 714-460562-002 COVER ELECTRODE HOUSEING, ESC
123 LAM 714-704612-001 LINER, CROSSBAR
124 LAM 715-000743-001 MOUNT GEAR CAP
125 LAM 715-001147-002 KEY, 1/8" SQ. X 0.75" LG.
126 LAM 715-001147-006 KEY, 1/8" SQ. X 3.00" LG.
127 LAM 715-001408-001 ELECTRODE, UPPER
128 LAM 715-001408-003 ELECTRODE, UPPER
129 LAM 715-002007-001 REACTOR HINGE PIN 715-02007-1
130 LAM 715-002206-001 RING, CLAMP ELECTRODE
131 LAM 715-004042-001 ELECTRODE 8"
132 LAM 715-004042-002 ELECTRODE, LOWER
133 LAM 715-004042-003 ELECTRODE, LOWER
134 LAM 715-004042-004 ELECTRODE, LOWER
135 LAM 715-005153-001 SEAL PLATE, REAR
136 LAM 715-005213-001 FOUR PIN LIFTER REPAIR
137 LAM 715-005844-001 RING, ORIFICE
138 LAM 715-005965-001 SEAL PLATE, FRONT
139 LAM 715-006213-001 FOUR PIN LIFTER FLANGE
140 LAM 715-006362-006 SCREW #8 ANODIZED
141 LAM 715-006389-001 SPACER CHAMBER
142 LAM 715-006436-001 BARRIER ION ANODIZED
143 LAM 715-006681-001 BAFFLE, LOWER
144 LAM 715-006719-001 PLATE, SEAL
145 LAM 715-007025-001 ELECTRODE, UPPER
146 LAM 715-007172-001 THREADED FLANGE CLAMP
147 LAM 715-007172-002 FLANGE CLAMP
148 LAM 715-007413-001 FOUR PIN LIFTER
149 LAM 715-007434-001 INSERT GAP HOUSING
150 LAM 715-007435-001 QUAD SEAL RING
151 LAM 715-007469-001 ELECRODE, LOWER (4-PIN)
152 LAM 715-007469-002 ANODE 3 MILS HARD ANODIZED
153 LAM 715-007469-101 ELECTRODE, LOWER (4-PIN)
154 LAM 715-007469-102 LOWER ELECTRODE
155 LAM 715-007999-002 ELECTRODE, LOWER (4-PIN)
156 LAM 715-008079-001 ELECTRODE AL. 5 MIL ANODIZE
157 LAM 715-008331-001 FILTER
158 LAM 715-008369-001 LIFTER, WAFER 4-PIN (0.082)
159 LAM 715-008721-001 ELECTRODE, ALUM.
160 LAM 715-008721-001-R ELECTRODE, ALUM, RADIUS EDGE
161 LAM 715-008763-001 BAFFLE, UPPER
162 LAM 715-009161-001 LIFTER, 4 PIN
163 LAM 715-009306-004 RING, FOCUS OUTER, ALUM.
164 LAM 715-009306-005 FOCUS RING 5"
165 LAM 715-009306-006 RING, FOCUS ANODIZED
166 LAM 715-009306-006 Ring, Focus, Aluminum, 6", 490
167 LAM 715-009306-006 Ring, Focus, Ceramic, 6", 490
168 LAM 715-009345-001 LOWER SEAL PLATE
169 LAM 715-009360-006 FOCUS RING 715-00936-006
170 LAM 715-009394-001 ELECTRODE, UPPER
171 LAM 715-009583-001 ENTRANCE AND EXIT LIFTER
172 LAM 715-009657-001 RING, EDGE, ANODIZED
173 LAM 715-009777-001 CAP, ELECTRODE
174 LAM 715-009777-002 CAP, ELECTRODE
175 LAM 715-009778-001 CAP, ELECTRODE
176 LAM 715-009778-002 CAP, ELECTRODE
177 LAM 715-009779-001 ELECTRODE, LOWER (4-PIN)
178 LAM 715-009779-002 ELECTRODE, LOWER (4-PIN)
179 LAM 715-009827-001 RING, FOCUS INNER, ALUM.
180 LAM 715-009828-001 RING, EDGE 5"
181 LAM 715-011116-002 SLEEVE, NUT, ADJUST
182 LAM 715-011148-002 ASSY, ARM, TENSIONER, CHAIN
183 LAM 715-011148-002 Arm, Tensioner, Chain
184 LAM 715-011148-002 Arm, Tensioner, Chain, Pin
185 LAM 715-011148-002(A) ARM, TENSIONER, CHAIN
186 LAM 715-011148-002(B) ARM, TENSIONER, CHAIN, PIN
187 LAM 715-011502-001 RING, UPPER COOLING
188 LAM 715-011531-002 ELECTRODE ALUM. ANODIZED
189 LAM 715-011531-008 ELECTRODE ALUM. ANODIZED
190 LAM 715-011531-009 ELECTRODE ALUM. ANODIZED
191 LAM 715-011531-011 ELECTRODE, UPPER
192 LAM 715-011531-012 ELECTRODE, UPPER
193 LAM 715-011531-014 ELECTRODE ALUM. ANODIZED
194 LAM 715-011531-015 ELECTRODE ALUM. ANODIZED
195 LAM 715-011531-102 ELECTRODE ALUM. ANODIZED
196 LAM 715-011532-001 SEAL PLATE
197 LAM 715-011535-001 RING ELECTRODE CLAMP
198 LAM 715-011559-262 CLAMP
199 LAM 715-011563-161 CLAMP, WAFER, DOMED, CERAMIC, 6", 1-FLAT, 4500
200 LAM 715-011565-001 BOLT, CLAMP
201 LAM 715-011565-002 BOLT, CLAMP RETAINING
202 LAM 715-011622-001 LIFTER WAFER 4 - PIN
203 LAM 715-011622-101 LIFTER, WAFER, 4 PIN, FLEXIBLE
204 LAM 715-011629-006 CAP, ELECTRODE, FLAT
205 LAM 715-011629-008 ELECTRODE, LOWER
206 LAM 715-011640-001 RING, FOCUS, LOWER
207 LAM 715-011640-004 RING, FOCUS ANODIZED 4"
208 LAM 715-011640-005 FOCUS RING, ANODIZED
209 LAM 715-011640-006 RING, FOCUS
210 LAM 715-011640-008 FOCUS RING, ANODIZED
211 LAM 715-011664-006 CAP,LOWER ELECTRODE 6"
212 LAM 715-011665-006 LOWER, ELECTRODE, CAP W/VENT GROOVE
213 LAM 715-011673-006 CAP, LOWER ELECTRODE 6"
214 LAM 715-011673-105 CAP, LOWER ELECTRODE
215 LAM 715-011673-106 CAP, LOWER ELECTRODE 6"
216 LAM 715-011746-141 Plate Wafer Clamp 4"
217 LAM 715-011746-151 PLATE 5" .020 DOME REDUCED HEAT
218 LAM 715-011746-156 PLATE, WAFER CLAMP
219 LAM 715-011746-161 PLATE, WAFER CLAMP
220 LAM 715-011749-005 EDGE RING, 5" WAFER CLAMP
221 LAM 715-011749-006 EDGE RING, ANODIZED
222 LAM 715-011753-001 PLATE, BAFFLE, UPPER 6"
223 LAM 715-011754-001 BAFFLE
224 LAM 715-011912-083 BAFFLE, UPPER
225 LAM 715-011913-080 BAFFLE, LOWER
226 LAM 715-011913-083 BAFFLE, LOWER
227 LAM 715-011913-501 BAFFLE, LOWER
228 LAM 715-011925-001 BOLT, CAPPED, CLAMPED RETAINING
229 LAM 715-011927-001 BOLT CAPPED ELECTRODE RETAINING
230 LAM 715-011982-001 CAP, PLUNGER, HOUSING LOWER
231 LAM 715-011985-006 CAP, LOWER ELECTRODE 6" DOMED
232 LAM 715-011985-106 ELECTRODE, LOWER
233 LAM 715-011986-108 CAP, LOWER ELECTRODE
234 LAM 715-012615-001 BLOCK MOUNTING INDEXER REAR
235 LAM 715-018991-006 ELECTRODE,ALUM.ANOD.
236 LAM 715-018991-206 ELECTRODE
237 LAM 715-018991-208 UPPER ELECTRODE
238 LAM 715-021970-008 HOLDER WAFER 8"
239 LAM 715-025106-001 BAFFLE PLATE 8"
240 LAM 715-028087-005 SHROUD 6" HARD ANODIZE
241 LAM 715-028087-101 SHROUD
242 LAM 715-028305-001 CLAMP RETAINER, 1 TURN
243 LAM 715-028408-100 ELECTRODE, UPPER bbbbL
244 LAM 715-028486-002 PLATE, UPPER SEAL 6" ELECT
245 LAM 715-028559-001 SHOWER HEAD 6"
246 LAM 715-028606-161 Wafer Clamp 6"
247 LAM 715-028626-002 BAFFLE, UPPER
248 LAM 715-028627-003 BAFFLE, LOWER
249 LAM 715-030136-003 R, EDGE, ESC, 6", FLAT, 4420
250 LAM 715-030320-001 BSR Injection Ring
251 LAM 715-031752-205 CAP, LWR ELECT. 5" DOME .020
252 LAM 715-031752-206 ELECTRODE, LOWER CAP
253 LAM 715-031752-208 CAP LOWER ELECTRODE
254 LAM 715-033098-001 GAS RING
255 LAM 715-07469-002 Electrode, Al.
的产品都可以来找我！
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器 接触器 变压器 、 Cutler-Hammer（卡特拉-汉莫）、艾默生电机、PQ、
VERSA 这些品牌我们价格都很美好。
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主营：世界知名品牌的PLC 、DCS 系统备件 模块
①Allen-Bradley(美国AB)系列产品》
②Schneider(施耐德电气)系列产品》
③General electric(通用电气)系列产品》
④Westinghouse（美国西屋）系列产品》
⑤SIEMENS(西门子系列产品)》
⑥销售ABB Robots. FANUC Robots、YASKAWA Robots、KUKA Robots、Mitsubishi Robots、OTC Robots、Panasonic Robots、MOTOMAN Robots。
⑦estinghouse（西屋）： OVATION系统、WDPF系统、MAX1000系统备件。
⑧Invensys Foxboro（福克斯波罗）：I/A Series系统，FBM（现场输入/输出模块）顺序控制、梯形 逻辑控制、事故追忆处理、数模转换、输入/输出信号处理、数据通信及处理等。Invensys Triconex: 冗余容错控制系统、基于三重模件冗余（TMR）结构的zui现代化的容错控制器。
⑨Siemens(西门子)：Siemens MOORE， Siemens Simatic C1，Siemens数控系统等。
⑩Bosch Rexroth（博世力士乐）：Indramat，I/O模块,PLC控制器,驱动模块等。
◆Motorola（摩托罗拉）：MVME 162、MVME 167、MVME1772、MVME177等系列。
Systems
LAM A6 DSiE
LAM A6 9400DFM
LAM A6 9600DFM
LAM 9600SE
LAM 9600SE II
Etcher Inner Gate Valve Drive 853-012200-002
2 Outer Gate Assy 853-012350-002
3 HARMONIC ARM DRIVE ASSEMBLY 853-012123-001
4 MONITOR ASSY 852-017500-003
5 Wafer Shuttle assy 853-012550-001
6 SEAL PLATE? 853-020936-002
7 BRAKE,GAP,ASSY 853-011141-003
8 UPPER ARM ASSEMBLY 853-012100-001
9 HARD DRIVE
10 WAFER HANDLER 715-130080-008
11 End Effector 715-130092-008
12 TRANSbbbbER & CAP 853-017370-001
13 TWIN FAN ASSY 853-017335-101
14 STEPPER MOTOR MOTHER BOARD 810-17010-001
15 INTERFACE PCB 044-612
16 PCB 810-017075-003
17 FORCE COMPUTERS PCB 810-017034-300
18 FORCE COMPUTERS PCB 810-017035-001
19 ASSEMBLY HARD DRIVE, IDE W/CONTROLLER 853-190023-001
20 INTERFACE PCB/ORBITAL GAS BOX PCB 810-017074
21 SOLENOID INTERLOCK BOARD/SOLENOID INTLK PCB 810-17004-001
22 STEPPER MOTOR DRIVER BOARD 810-017016-001
23 WELDMENT 839-011237-001
24 ASSY GAP DRIVE PROTECTOR 853-011168
25 Wafer Shuttle assy 853-012550-001
26 NOISE FILTER ZCAT2035-1330 037-000909-1
27 SOLENOID INTERLOCK BOARD 810-17004-001
28 NOISE FILTER TRCN-40-27-15 037-001122-1
29 DOMED ELECTRODE LEVELING 515-011835-001
30 PLATE BAFFLE UPPER 8.3 715-011912-083
31 COVER BELL 1D10-402315-11
32 OXA UL 805
33 UPPER COOLING RING 853-011555-001
34 LAM COOLING RING LOWER ELECTRODE 715-011626-001
35 14021T-93812
36 JIG P-PIN SHAFT 1D10-303003-11
37 ASSY GAP DR MOT PTCTR & B/O 853-011168-002
38 PUMP 853-013542-002-1
39 PCB ASSY DUAL DC MTR 233-2974-29
40 CHAMBER GARD WG3D228R2
41 MPS-4/ASSY GAP DRIVE PROTECTOR 853-011168-001
42 RETAINER bbbbbb 715-011039-001
43 CVP CLASS BC/RF SWITCH BOX 853-017163-001
44 RESISTOR BANK ?
45 CHILLER RESISTIVITY 810-025369-002
46 OUTER GATE ASSY 853-012350-002
47 CHAMBER RIM ?
48 CHAMBER LID 715-11035-001
49 CHAMBER 715-011002-002
50 Jig bell 1D10-402315-11
51 Plate baffle Lower 715-011913-555
52 Emflon filter MDY2230FTEH11
53 ATMI Smartprobe 512760-05
54 ATMI Dispencer 3334764
55 Tylan General pressure guage CDLS-21S06-EMC
56 ELECTROINC MODULE TRK2/5
57 ELECTROINC MODULE NO NUMBER
58 COHU CAMERA POWER UNIT 6712-2000/0000
59 WAFER LOADERS Y7603203
60 PNEUMATIC CONTROOL UNIT Y7654000
61 MONITOR 38-C34DND-01
62 WAFER DISPENSER EMA 54-010633 A 0501
63 WAFER DISPENSER 18-010698
718-094756-081 1 oem new
715-011912-083 plate baffle upper 2 oem new
715-28554-002 ESC plate 1 oem used
715-011531-009 Electrode Al , Anodized 1 oem new
LAM Rebbbbbb 853-012350-002 Outer Gate Assy 6
LAM Rebbbbbb 853-012123-001 HARMONIC ARM DRIVE ASSEMBLY 6
LAM Rebbbbbb 852-017500-003 MONITOR ASSY 2
LAM Rebbbbbb 853-012550-001 Wafer Shuttle assy 4
LAM Rebbbbbb 853-020936-002 SEAL PLATE? 3
LAM Rebbbbbb 853-011141-003 BRAKE,GAP,ASSY 4
LAM Rebbbbbb 853-012100-001 UPPER ARM ASSEMBLY 4
LAM Rebbbbbb 715-130080-008 WAFER HANDLER 3
LAM Rebbbbbb 715-130092-008 End Effector 3
LAM Rebbbbbb 853-017370-001 TRANSbbbbER & CAP 2
LAM Rebbbbbb 853-017335-101 TWIN FAN ASSY 4
LAM Rebbbbbb 810-17010-001 STEPPER MOTOR MOTHER BOARD 4
LAM Rebbbbbb 044-612 INTERFACE PCB 2
LAM Rebbbbbb 810-017075-003 PCB 4
LAM Rebbbbbb 810-017034-300 FORCE COMPUTERS PCB 2
LAM Rebbbbbb 810-017035-001 FORCE COMPUTERS PCB 3
LAM Rebbbbbb 853-190023-001 ASSEMBLY HARD DRIVE, IDE W/CONTROLLER 2
LAM Rebbbbbb 810-017074 INTERFACE PCB/ORBITAL GAS BOX PCB 1
LAM Rebbbbbb 810-17004-001 SOLENOID INTERLOCK BOARD/SOLENOID INTLK PCB 2
LAM Rebbbbbb 810-017016-001 STEPPER MOTOR DRIVER BOARD 28
LAM Rebbbbbb 853-011168 ASSY GAP DRIVE PROTECTOR 4
LAM Rebbbbbb 853-012550-001 Wafer Shuttle assy 1
LAM Rebbbbbb 037-000909-1 NOISE FILTER ZCAT2035-1330 1
LAM Rebbbbbb 810-17004-001 SOLENOID INTERLOCK BOARD 1
LAM Rebbbbbb 037-001122-1 NOISE FILTER TRCN-40-27-15 1
LAM Rebbbbbb 515-011835-001 DOMED ELECTRODE LEVELING 1
LAM Rebbbbbb 715-011912-083 PLATE BAFFLE UPPER 8.3 6
LAM Rebbbbbb 1D10-402315-11 COVER BELL 4
LAM Rebbbbbb OXA UL 805 2
LAM Rebbbbbb 853-011555-001 UPPER COOLING RING 1
LAM Rebbbbbb 715-011626-001 LAM COOLING RING LOWER ELECTRODE 1
LAM Rebbbbbb 14021T-93812 1
LAM Rebbbbbb 1D10-303003-11 JIG P-PIN SHAFT 1
LAM Rebbbbbb 853-011168-002 ASSY GAP DR MOT PTCTR & B/O 1
LAM Rebbbbbb 853-013542-002-1 PUMP 2
LAM Rebbbbbb 233-2974-29 PCB ASSY DUAL DC MTR 1
LAM Rebbbbbb WG3D228R2 CHAMBER GARD 3
LAM Rebbbbbb 853-011168-001 MPS-4/ASSY GAP DRIVE PROTECTOR 1
LAM Rebbbbbb 715-011039-001 RETAINER bbbbbb 1
LAM Rebbbbbb 853-017163-001 CVP CLASS BC/RF SWITCH BOX 2
LAM Rebbbbbb ? RESISTOR BANK 1
LAM Rebbbbbb 810-025369-002 CHILLER RESISTIVITY 1
LAM Rebbbbbb 853-012350-002 OUTER GATE ASSY 1
LAM Rebbbbbb 715-011002-002 CHAMBER 1
LAM Rebbbbbb 1D10-402315-11 Jig bell 2
LAM Rebbbbbb 715-011913-555 Plate baffle Lower 1
LAM Rebbbbbb MDY2230FTEH11 Emflon filter 1
LAM Rebbbbbb 512760-05 ATMI Smartprobe 8 LAM 4499H-004
LAM 713-011203-001
LAM 713-011205-001
LAM 713-011585-004(R1)
LAM 713-100178-001
LAM 713-100178-001
LAM 713-100197-001
LAM 713-100197-001
LAM 713-100197-002
LAM 713-330504-082
LAM 715-011492-008
LAM 715-011535-001
LAM 715-011640-006
LAM 715-011905-001
LAM 715-011909-001
LAM 715-011912-083
LAM 715-028608-161
LAM 715-028626-002
LAM 715-028627-002
LAM 715-030136-003
LAM 715-030320-001
LAM 715-031450-003
LAM 715-031518-001
LAM 715-031518-001
LAM 715-031522-001
LAM 715-140124-001-A
LAM 715-140125-001-A
LAM 715-140126-001-A
LAM 715-330087-001
LAM 715-330092-002
LAM 715-330133-001
LAM 715-330135-001
LAM 715-330135-001
LAM 715-330135-001
LAM 715-330188-001
LAM 715-330825-004
LAM 715-330825-004
LAM 715-330825-004
LAM 715-330825-005
LAM 715-330825-005
LAM 715-330825-006
LAM 715-330825-007
LAM 715-330915-001
LAM 715-330987-001
LAM 715-330987-001
LAM 715-350036-001
LAM 715-443130-001
LAM 716-011009-001
LAM 716-011009-001
LAM 716-011009-001
LAM 716-011009-001
LAM 716-011057-002
LAM 716-011427-001
LAM 716-011493-001
LAM 716-011510-001
LAM 716-011533-001
LAM 716-011540-001
LAM 716-011543-003
LAM 716-011564-002
LAM 716-011570-001
LAM 716-011585-004(R1)
LAM 716-011638-008
LAM 716-011638-008
LAM 716-011923-001
LAM 716-011923-001
LAM 716-018527-427
LAM 716-018537-428
LAM 716-020904-016
LAM 716-020904-018
LAM 716-021323-001
LAM 716-028123-001
LAM 716-028123-002
LAM 716-028454-012
LAM 716-028454-012
LAM 716-028454-012
LAM 716-028454-012
LAM 716-028454-015
LAM 716-028553-104
LAM 716-028721-281
LAM 716-028721-281
LAM 716-028721-288
LAM 716-028721-288
LAM 716-028721-288
LAM 716-028722-161
LAM 716-030135-001
LAM 716-030140-003
LAM 716-031052-001
LAM 716-031052-001
LAM 716-031453-002
LAM 716-031453-002
LAM 716-032339-001
LAM 716-051195-005
LAM 716-100180-003
LAM 716-100180-003
LAM 716-100180-003
LAM 716-140069-001
LAM 716-140069-001
LAM 716-140118-001
LAM 716-140139-008
LAM 716-140139-008
LAM 716-140139-008
LAM 716-140139-008
LAM 716-140139-211
LAM 716-140139-211
LAM 716-330045-001
LAM 716-330045-002
LAM 716-330045-012
LAM 716-330121-001
LAM 716-330121-001
LAM 716-330121-001
LAM 716-330121-001(R1)
LAM 716-330121-004
LAM 716-330121-201
LAM 716-330122-002
LAM 716-330135-001
LAM 716-330191-082
LAM 716-330394-002
LAM 716-330504-061(R1)
LAM 716-330504-081
LAM 716-330760-002
LAM 716-330890-001
LAM 716-330890-051
LAM 716-330892-005(=007)
LAM 716-330892-007
LAM 716-330915-001
LAM 716-331097-001
LAM 716-440345-288
LAM 716-440386-228
LAM 716-443083-004
LAM 716-443084-003
LAM 716-443086-308
LAM 716-443090-002
LAM 716-443129-001
LAM 718-094523-282
LAM 734-061978-274
LAM 734-061978-453
LAM 734-093789-001
LAM 839-011907-001
LAM 839-011907-001
LAM 839-011907-111
LAM 839-011908-100
LAM 713-028487-001
LAM 715-011204-002
LAM 715-011531-008
LAM 715-011531-009
LAM 715-011531-010
LAM 715-011531-011
LAM 715-011531-014
LAM 715-011531-102
LAM 715-011532-006
LAM 715-011746-151
LAM 715-011746-161
LAM 715-018991-206
LAM 715-018991-428
LAM 715-028486-002
LAM 715-028552-001
LAM 715-028628-XXX
LAM 715-028629-002
LAM 715-030136-003
LAM 715-031454-004
LAM 715-140080-001
LAM 715-140081-001
LAM 715-330106-104
LAM 715-330106-104R
LAM 715-330825-007R
LAM 715-330984-001
LAM 716-011563-161
LAM 716-011564-001
LAM 716-011564-003
LAM 716-011580-161
LAM 716-021717-XXX
LAM 716-028028-003
LAM 716-028123-002
LAM 716-028249-064
LAM 716-028668-XXX (-281)
LAM 716-028678-XXX (-251)
LAM 716-028688-XXX (-251)LAM 715-801916-803
LAM 666-032460-014
LAM 796-094747-001
LAM 734-021886-002
LAM 715-330394-010
LAM 852-017500-003
LAM 716-008802-001
LAM 715-42859-001
LAM 799-100332-001
LAM 853-140013-001-1-230S
LAM 715-011531-016
LAM 715-002542-001
LAM 715-028626-104
LAM 849-099343-003
LAM 710-039320-00
LAM 71-0002-025
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LAM 715-801021-339
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LAM 246875-024 720-009530-024
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LAM 853-190023-001
LAM 13-0072-150
LAM 668-540266-001
LAM 768-098511-001
LAM 714-140259-001
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LAM 853-190074-001
LAM 670-006780-012
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LAM 715-801021-801
LAM 713-011415-001
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LAM 856-380309-600
LAM 853-495526-001
LAM 734-007355-001
LAM A746-006598-001
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LAM 716-066539-008
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LAM 853-017816-020
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LAM 713-011203-001
LAM 853-177892-002
LAM 716-330045-216
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LAM 839-014578-101-A
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LAM 810-017003-002
LAM 790-130044-205
LAM 668-007083-003
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LAM 720-009532-010
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LAM 853-331019-001
LAM 715-066095-202
LAM 668-006724-006
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LAM 715-802381-104
LAM 716-460417-001
LAM 713-010221-001
LAM 668-003032-005
LAM 734-006655-001
LAM 718-803179-001
LAM 713-040420-004
LAM 839-170110-001
LAM 715-140144-002
LAM 716-067739-105
LAM 713-810529-001
LAM 810-077365-001
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LAM 716-330061-006
LAM 726-800644-001
LAM 715-011902-001
LAM 810-9281-1
LAM 724-S012529-001-00
LAM 684-019144-304
LAM 723-2377-1
LAM 853-001341-004
LAM 678-000815-001
LAM 715-027638-814
LAM 715-000103-001
LAM 715-160164-003
LAM 716-112640-012-D
LAM 714-412399-001
LAM 853-L017633-009
LAM 713-071820-004
LAM 713-043116-001
LAM 853-495527-002
LAM 851-8226-008
LAM 715-0015-001
LAM G17-08946-03
LAM 715-11001-002
LAM 853-17643-001
LAM 715-05865-001
LAM 716-11533-001
LAM 853-04106-001
LAM 715-00831-001
LAM 839-013913-001
LAM 714-802364-004
LAM 853-330160-001
LAM 515-009849-001
LAM 716-028688-261
LAM 713-071084-002
LAM 715-222451-003
LAM 920-062683-020
LAM 713-071820-002
LAM 852-012525-001
LAM 713-071880-004
LAM 715-410118-002
LAM 500-102376-003
LAM 839-000865-001
LAM 716-011563-168
LAM 518-410240-001
LAM 713-071872-004
LAM 853-001198-003
LAM 716-012639-125
LAM 713-072151-001
LAM 734-092358-001
LAM 715-000028-001
LAM 839-054692-001
LAM 734-007356-001
LAM 839-016641-002
LAM 713-052663-001
LAM 720-000940-014
LAM 655-612790-000
LAM 715-071646-002
LAM 716-026652-832
LAM 713-071670-001
LAM 734-000981-001
LAM 715-042524-001
LAM 734-091228-200
LAM 750-689383-000
LAM 853-001198-002
LAM 810-190549-003
LAM 715-052336-001
LAM 715-011597-001
LAM 853-017807-001
LAM 713-026330-004
LAM 713-140433-001
LAM 920-091519-005
LAM 839-074635-004
LAM 744-093789-001
LAM 720-000930-032
LAM 734-090745-001
LAM 715-011531-011
LAM 716-006753-001
LAM PWB115656-001
LAM 600749
LAM 721-000976-001
LAM 661-006743-001
LAM 676-000504-003
LAM 853-034279-102
LAM 853-032908-608
LAM 853-067076-011
LAM 839-014706-001-A
LAM 715-052343-001
LAM 857-020295-104
LAM 849-432144-001
LAM 715-011522-022
LAM 716-140207-001
LAM 810-802799-010
LAM 716-002483-188
LAM 853-370681-001
LAM 714-054679-001
LAM 714-002921-010
LAM 720-000930-004
LAM 716-021491-001
LAM 853-193702-003
LAM 714-017237-002
LAM 713-071532-003
LAM S31A-CB-006-Q
LAM 715-440547-001
LAM 715-802392-001
LAM 839-360139-001
LAM 714-053320-001
LAM 713-073096-001
LAM 853-350021-001
LAM 715-002031-001
LAM 853-490993-048
LAM 715-410118-001
LAM 746-000218-001
LAM 715-011913-501
LAM 714-054649-001 Lam Rebbbbbb 716-011540-001
LAM 716-001163-001
LAM 920-061486-002
LAM 670-060870-002 025757 LOWER ELECTRODE, INS. RING 100 MM
602120 CERAMIC PIN
2100469 bbbbbb QUARTZ
2301853 LOWER INSULATOR RING CERAMIC
713-011203-001 COVER 90 DEG. ENTRANCE LOADLOCK
713-011205-001 COVER 180 DEG. EXIT LOADLOCK
713-018624-302 RING FOCUS 6"
713-028123-001 RING FILLER TEFLON SPACER
713-028487-001 RING CONFINEMENT, VESPEL
713-540183-002 RING UPPER PEEK
713-540184-004 RING UPPER PEEK
715-011531-011 ELECTRODE ALUMINUM ANODIZED
715-011531-016 ELECTRODE ALUMINUM ANODIZED
715-011905-001 PLATE, UPPER ELECTRODE SILICON 6"
715-030319-001 COVER, NUT
715-443178-300 R,EDGE,HOT-300MM Al, 300mm
716-000941-001 PLATE PLASMA DISTRIBUTION
716-003543-006 EDGE RING SILICON, 300mm, EXELAN
716-004655-001 RING QUARTZ UPPER
716-007136-002 UPPER QUARTZ RING HPT
716-007136-003 (S) UPPER RING HPT
716-008645-001 (S) COVER RING HPT
716-011009-001 bbbbbb,QUARTZ
716-011036-001 RING,FILLER ORIFICE,ALUMINA
716-011057-002 RING,FILLER UPPER,ALUMINA
716-011427-001 DISK QUARTZ MECHANICAL POLISH
716-011493-001 SPACER,QUARTZ,MODULE,<NSIR>
716-011533-001 bbbbbb,QUARTZ,<NSIR>
716-011536-001 RING INSULATOR-UPPER ELECTRODE
716-011540-001 RING, FACE, UPPER ELECTRODE (Al)
716-011543-001 PLATE,WAFER CLAMP ATTACHMENT
716-011563-061 INNER RING, 6" SHADOW
716-011563-161 PLT,WAFER CLAMP 6 IN,DOMED
716-011563-261 PLT,WAFER CLAMP 6 IN,DOMED
716-011570-001 FILLER,ORIFICE,WAFER
716-011580-161 PLATE,WAFER CLAMP 6 IN (1.5MM
716-011623-001 RING CLAMP, ESC 6"
716-011624-001 RING, INSULATOR, LOWER ELECTRODE
716-011624-005 RING INSULATOR LOWER ELECTRODE
716-011624-007 RING, INSULATOR, LOWER ELECTRODE 716-011764-281 PLATE, WAFER, CLAMP, 8" .035 DOME
716-011830-005 RING,FOCUS,ALUMINA,WAFER CLAMP
716-011830-006 RING,FOCUS,ALUMINA,WAFER CLAMP
716-011830-008 RING, FOCUS (ALUMINA) WAFER CLAMP
716-011904-001 RING BACKING, UPPER ELECTRODE 6", GRAPHITE
716-011922-001 RING, ELECTRODE CLAMP 6" ELECTRODE
716-011923-001 PLATE,WAFER CLAMP ATTACHMENT
716-012639-014 NOZ,GAS ROL-1 CTR. HOLE, QTZ 2300 bbbbL, 300mm
716-014316-001 PLT. MTG, 200mm COIL, ALUMINA, 2300
716-016394-001 (S) CONFINEMENT RING HPT
716-020904-016 RING,EDGE FOCUS,LOWER WAFER
716-020904-018 RING, EDGE FOCUS, LOWER WAFER CLAMP
716-020905-001 RING,FILLER,LOWER WAFER CLAMP
716-020906-161 CLAMP RING DOMED W/PINS
716-020931-030 PLUNGER, 1/4 TURN
716-021323-001 FUNNEL,QUARTZ,STRIPPER
716-021323-002 FUNNEL QTZ PS MODULE
716-021491-001 SPACER,DIRECTOR,PROCESS
716-021717-002 JAR,BELL,SLEEVE,ISOTROPIC ETCH
716-021843-001 JAR,BELL,BASE,ISOTROPIC ETCH
716-025916-001 PLUG ESC WAFER PROBE, 2300
716-028028-004 RING,ELECTRODE CLAMP(6 IN
716-028123-002 RING, FILLER (CERAMIC)
716-028249-061 RING,FOCUS,JEIDA 6"
716-028414-015 FOCUS RING 5"
716-028454-012 DISK, QUARTZ, <NSIR>
716-028668-151 PLT,TOP WAFER CLAMP,DOMED SHADOW 1.5mm COV. W/PINS
716-028668-261 PLT,TOP WAFER CLAMP,DOMED SHADOW
716-028668-268 PLT,TOP WAFER CLAMP,DOMED SHADOW
716-028668-281 PLT, TOP WAFER CLAMP, DOMED SHADOW
716-028678-261 CLAMP, CERAMIC, 6" 4500
716-028688-581 PLT, BOTTOM WAFER CLAMP, DOMED
716-028721-261 PLT,BOTTOM WAFER CLAMP,DOMED
716-028721-268 PLT, BOTTOM WAFER CLAMP, DOMED
716-028721-281 PLT,BOTTOM WAFER CLAMP,DOMED
716-028722-161 PLT,BOTTOM WAFER CLAMP,DOMED
716-028725-161 PLT, BOTTOM WAFER CLAMP DOMED
716-028761-241 PLATE TOP WAFER CLAMP 4", 2.25 MM COV.
716-028768-001 LOWER ELECTRODE 6"
716-030135-001 RING,EDGE,8" ELECTROSTATIC
716-030136-001 RING EDGE 6' WITH FLAT
716-030136-016 EDGE RING CERAMIC
716-031052-001 WDO,QTZ,HTD,ENDPOINT,<NSIR>
716-031052-002 bbbbbb QUARTZ HTD ENDPOINT
716-031453-001 RING,FILLER,LOWER CHAMBER
716-031453-002 RING, FILLER, LOWER CHAMBER, ESC
716-038612-002 PIN, PICK UP DC BIAS SiC
716-038657-418 COVER, FOCUS RING, Si3N4, ESC 8" 716-074512-002 PIN LIFTER-LOADLOCK, <NSIR>
716-077758-016 RING, EDGE FOCUS ORIFICE, CONMBO,6in, L
716-140118-001 RING,FOCUS,ESC,8 IN
716-140125-100 BAFFLE LOWER OF THREE SIC
716-140139-001 RING HOT EDGE CERAMIC
716-140139-008 RING,HOT EDGE,HIGH WALL,ESC
716-140139-211 RING,HOT EDGE,HIGH WALL,ESC 8"
716-140141-001 RING HOT EDGE 15 JDA-JDA 6",CERAMIC
716-140141-261 RING HOT EDGE 15 JDA-JDA 6",<NSIR>
716-140163-001 RING HOT EDGE 15 DEG ESC CERAMIC
716-140163-261 RING,HOT EDGE,15 DEG.ESC STD
716-140236-002 RING,CONFINEMENT,MODULAR,QTZ
716-140236-003 RING CONFINEMENT MODULAR QUARTZ
716-140236-061 RING, CONFINEMENT, MODULAR, QUARTZ
716-140236-062 RING,CONFINEMENT,MODULAR,QUARTZ
716-140236-803 RING CONFINEMENT MODULAR QUARTZ - KIT H
716-140239-001 RING HOT EDGE
716-140427-001 RING,HOT EDGE,15,NTCH,ESC,STD
716-140432-001 RING, UPPER, KEYED
716-140432-002 INSERT RING, UPPER, KEYED
716-140432-004 UPPER KEYED
716-140432-061 RING, UPPER, KEYED, 6"
716-140432-804 INSERT RING, UPPER, KEYED - KIT I
716-160255-002 BELL JAR SLEEVE
716-249040-001 RING,FOCUS,ESC,150MM
716-250463-001 LINER CERAMIC
716-250514-001 CLAMP SHADOW CER 45, 150MM
716-252749-001 HEATER LINER RING
716-252750-001 FOCUS RING ADAPTOR
716-252855-001 VIEW PORT
716-252856-001 TRANSFER PART
716-252857-001 ESC ARM COVER
716-330045-001 RING EDGE 8" ESC MAJ. FLAT
716-330045-002 RING EDGE 8" MAJ. FLAT ESC, VAR. GAP
716-330045-004 RING EDGE 8" ESC
716-330045-261 RING EDGE 6" FLAT ESC.
716-330045-281 RING EDGE 8" NCH, SHDV R-ESC
716-330121-001 bbbbbb,RF,SHAPED CERAMIC,FIXED
716-330121-006 bbbbbb,RF
716-330121-016 bbbbbb RF SHAPED, CERAMIC
716-330121-201 bbbbbb, RF, SHAPED,CERAMIC,FIXED
716-330122-003 PLATE, TOP CERAMIC FIXED GAP WITH SHIELD
716-330162-002 RING,FILLER,B.A.C.
716-330167-141 RING,CLAMP,BOTTOM ACTUATOR
716-330167-161 RING,CLAMP,BOTTOM ACTUATOR
716-330167-181 RING,CLAMP,BOTTOM,ACTUATOR
716-330167-261 RING, CLAMP, BOTTOM ACTUATOR
716-330167-288 RING,CLAMP,BOTTOM ACTUATOR
716-330355-001 bbbbbb, QTZ, HTD ENDPOINT, <NSIR>
716-330355-002 bbbbbb QUARTZ DUAL HEATED
716-044035-001 bbbbbb QUARTZ 716-330504-064 RING FOCUS, 6" ESC, GUARD RING
716-330504-065 RING FOCUS, 6" ESC, GUARD RING
716-330504-081 RING, FOCUS, 8" ESC, GUARD RING
716-330760-003 RING, SHADOW, 2.25mm COVERAGE
716-330830-164 RING EDGE 6" CERAMIC
716-330890-001 RING, CNTMNT, RCTN CHAMBER 8"
716-330890-006 RING, CNTMNT, RCTN CHAMBER 6"
716-330891-002 bbbbbb,TCP,QUARTZ,9600XX
716-330892-007 PLATE GAS DISTRIBUTION, 21 HOLES
716-330915-001 INSULATOR, ESC
716-330915-003 SLV, INSULATOR ESC LOW-CAP
716-331051-002 UNI RING
716-331088-001 RING,EDGE 8",ELECTROSTATIC, QUARTZ
716-331089-001 RING EDGE, 8" ES, BOT, CER
716-331099-001 R,EDGE,6" ESC,FL,TOP,QTZ
716-331128-001 bbbbbb SAPPHIRE
716-331142-001 RING EDGE TOP WIDE
716-331142-302 RING EDGE,TP 1mm,STP-300mm
716-331157-013 DISK INTERFEROMETER TOP GAS
716-331157-014 DISC INTERFEROMETER, FIREPOLISHED
716-331157-015 DISC INTERFEROMETER
716-402452-002 (S) COUPLING RING HPT
716-402452-003 COUPLING RING HPT
716-440054-061 RING, FOCUS 6" ESC
716-440274-002 bbbbbb, AlN 1370 AI
716-440345-261 PLT BOTTOM WAFER CLAMP, DOMED
716-441044-007 PLATE PLASMA DISTRIBUTION
716-441523-001 INSULATOR ELECTRODE LOWER, ESC
716-443083-004 CONFINEMENT RING
716-443084-003 CONFINEMENT RING
716-443086-301 HOT EDGE RING
716-443086-401 EDGE RING SILICON
716-443090-002 RING,QUARTZ,UPPER
716-443090-202 UPPER RING, SiC
716-443179-102 RING EDGE BASE
716-443217-002 RING CLAMP UPPER SIC
716-443234-002 (S) INNER FOCUS RING HPT
716-460215-001 RING FOCUS 6" STP CHAMBER
716-460215-002 RING, FOCUS, 6 IN STRIP CHAMBER
716-460216-002 RING, FOCUS 8", STP CHMBR
716-460758-001 LNR, VIEWPORT HTD LNR TCP OXD
716-460785-002 PLATE SHOWER HEAD 10 HOLES SiC GDP
716-460875-002 INSULATOR
716-460915-001 INNER COVER, COMPOSITE FOCUS RING SiC 6" SEMI
716-460915-002 OUTER COVER, COMPOSITE FOCUS RING Si3N4 6" SEMI
716-460916-001 INNER COVER, COMPOSITE FOCUS RING SiC 8" 716-461194-002 INNER COVER COMPOSITEFOCUS RING, SiC 6" NO FLAT
716-540198-001 bbbbbb,FUSED SILICA
716-800952-001 BASE,FOCUS RING,SHIELDED 300MM
716-801140-002 LINER,QUARTZ,PLASMA CHAMBER,6"
716-801667-001 bbbbbb,QUARTZ
716-460916-002 OUTER COVER, COMPOSITE FOCUS RING Si3N4 8"
716-460953-001 INNER COVER, COMPOSITE FOCUS RING SiC 8" JEIDA
716-460953-002 OUTER COVER, COMPOSITE FOCUS RING Si3N4 8" JEIDA
716-461194-001 INNER COVER COMPOSITE FOCUS RING, Si3N4 6" NO FLAT
716-074512-001 PIN LIFTER-LOADLOCK
716-011638-006 RING, FOCUS, THIN EDGE
716-011638-008 RING,FOCUS,THIN EDGE Adjuster, Ceramic, Gas Plate 15-00043-02
CERAMIC INSULATOR GAS FEED 15-00475-00
Ring Heater Centering,Ceramic 15-00484-00 REV.C
SJIELD, HEATER, STRAP 2.00 15-00558-01
(U)SLEEVE HTR LEAD CERANIC 15-00558-01(U)
SHIELD HEATER LEAD 2.75" 15-00558-02
Sleeve Flanged AC Feedthru Ceramic 15-00578-00
CERAMIC KEYED BUSHING 15-00731-00
RING, INSULATOR,200MM 15-032503-00
FORK-FINGER 15-053394-01 REV.A
FORK-FINGER 15-053394-02 REV.A
FORK-FINGER 15-053394-03 REV.A
SLEEVE CERAMIC,FEEDTHRU,COVER 15-107698-00
NSULATOR,GAS DISTRIBUTION CVD-W 15-11606-00 REV.B
RING INSULATOR ANODE 15-118123-00
RING, GUARD, LTM, HDP300 15-150002-00 REV.D
INJECTOR,TUBE,CLN,SPEED 15-158185-00
BLADE(WTX TM ROBOT BLADE) 15-250449-00(S)
Plate, Fork Retainer, Bottom, 200mm, Ceramic 15-277463-00
CR INSERT NUT 15-287254-00
PIN,3SPD 15-298024-00
SPACER, DISK, PEDESTAL, 300MM 15-303364-00
NOVELLUS, CERAMIC FORK, C1-150MM 15-305056-00
PLATE,BOTTOM,CERAMIC,C1-150 15-305097-00
HOLDER,WAFER,MOER RING,C3 ALTUS 15-325718-00
Edge Ring 716-003686-188
INSULATOR RING 716-006721-001
RING FACE UPPER ELECTRODE 716-011540-001 REV.00
RING FOCUS ORIFICE COMBO-5" 716-011758-015 REV.G
Ring Edge BOT 200-300mm 716-026652-002
Domed Wafer Clamp 716-028678-245
RING EDGE8"ELECTROSTAIC NPTCHED 716-030135-001 REV A
bbbbL L QUARTZ TOP EDGE RING 716-031257-534 REV.D
DMF-P EDGE RING 716-031535-008
UPPER INSULATOR CENTER RING_BEBEL 716-059395-200
PIN LIFTER LOADLOCK 716-074512-002
TOP EDGE RING 716-077262-111(U1)
QTZ COVER RING SLOPE FOR FLEX GX 716-087943-892
QTZ COVER RING-FOR FLEX-GX 716-087943-913
COVER, QUARTZ INNER 5XX CER 13.5D 716-087943-913
RING CONTROL COND QTZ 05 SLOT 716-088516-807 REV.B
PRESSUER CONTROL RING,NO SLOT_FOR 716-088516-810
RING EDGE 8", NOTCH, ESC VAR GAP 716-330045-002
RING EDGE NON LANDED 8" NOTCHED 9600PTX 716-330045-281
TOP, CERAMIC, FXD GAP W/SHLD 716-330122-003
RING, FOCUS 8" ESC, GUARD RING 716-330504-081
NSUL ESC 9600XX 716-330915-001
R,UNIFIY,CUT-OUT,AS-FIRED 716-331051-002 REV.E3
RING,EDGE,TOP,WIDE 716-331142-007
FOCUS RING ESC INNE 8" 716-443129-001
CONFINEMENT BOTTOM 716-44383-003
CONFINEMENT TOP 716-44383-004
BAES FOCUS RING 300MM 716-800952-001 413-330504-082 RING FOCUS FLAT 9608 ETCH 9600 AL2O3 99.5% 8"
713-001585-004 GDP CAP SCREW ETCH 9600 ZrO2 + SUS 8"
713-028553-103-REV, COMFINEMENT RING CERAMIC ETCH RAINBOW 4528 Al2O3 99.5% 8"
716-005773-005 FOCUS RING ETCH TCP 9600 Al2O3 99.5% 5"
716-006721-001 INSULATOR RING ETCH Al2O3 99.5%
716-011057-002 RING FILLER UPPER Al2O3 99.5% 8"
716-011427-003 CERAMIC DISK ETCH Al2O3 99.5% 8"
716-011540-001 UPPER FACE RING Al2O3 99.5% 8"
716-011563-063 WAFER CLAMP 6INCH ETCH RAINBOW 4520 Al2O3 99.5% 6"
716-011563-151 UNIVERSAL CLAMP RING ETCH RAINBOW 4520 Al2O3 99.5% 5"
716-011563-161 WAFER CLAMP 6 INCH ETCH RAINBOW 4520 Al2O3 99.5% 6" 716-000941-001 Plate,Plasma Dist.
716-006446-001 DIFFUSER
716-006721-001 INSULATOR RING
716-006753-001 INSULATOR
716-007136-002 HPT UPPER QUARTZ RING
716-007136-010 RING, QTZ,UPPER HPT
716-008608-001 bbbbbb,Sapphire
716-008645-004 Confinement Ring, One Piece
716-011009-001 bbbbbb
716-011036-001 INSULATOR RING
716-011057-002 RING,FILLER,UPPER
716-011427-001 QUARTZ DISK
716-011505-001 DIFFUSER
716-011533-001 bbbbbb QUARTZ
716-011536-001 RING INSULATOR-UPPER ELECTRO
716-011540-001 RING,FACE-UPPER ELECTRODELAM 026182 Electrode, Upper, AL
2 LAM 2101363 WAFER CLAMP
3 LAM 2201679 Screw, Spring, Stainless Steel
4 LAM 2301700 Tube, Ceramic
5 LAM 2301856 Ring, Ceramic, ASIQ
6 LAM 2201679 SCREW, SPRING, STAINLESS STEEL
7 LAM 228-022-0241 CARTRIDGE, DEIONIZER, 10"
8 LAM 2301700 TUBE, CERAMIC
9 LAM 2301856 RING, CERAMIC, ASIQ
10 LAM 4C447 FRAME BLOWER MODEL: 4C447
11 LAM 5009100000 CLAMP, PLUNGER & RETAINER, CERAMIC (4420)
12 LAM 5009101000 SCREW, VENT, AL.
13 LAM 5009101001 SCREW, VENT, CERAMIC
14 LAM 5009106020 CLAMP, RETAINER, CERAMIC (RAINBOW 4420)
15 LAM 5009106034 ASSY, SPRING, PLUNGER, LAM
16 LAM 5009106067 CHAMBER, PLASMA, QUARTZ
17 LAM 5009106073 DISK, ALIGNMENT
18 LAM 5009106075 RING, COVER, QUARTZ
19 LAM 5009106084 SCREW, #6-32 X 5/8, SS
20 LAM 5009106106 KEY, 3/32 X 8.0 LG.
21 LAM 5009106127 PLUG, PIN, WAFER
22 LAM 5009106133 RING, CLAMP, AL, ASIQ
23 LAM 5009106134 WASHER, SS, 1/4", ASIQ
24 LAM 5009106135 SCREW, SPRING, STAINLESS, ASIQ
25 LAM 5009106137 SLEEVE, TEFLON, ASIQ
26 LAM 5009106138 E-CLIP, SS, ASIQ
27 LAM 5009106139 SCREW, SHOULDER, ASIQ
28 LAM 5009126001 INSULATOR, RING, LAM 490
29 LAM 5009176016 CAP, KEL-F, O.D. -0.370, I.D. -.280
30 LAM 5009176022 INSERT, PLUNGER
31 LAM 5009176028 DOOR, LOAD LOCK (ORIGINAL)
32 LAM 5009176034 CAP, THREADED, FEMALE, KEL-F
33 LAM 5009176035 PLUNGER, HOUSING, KEL-F
34 LAM 5009176036 SCREW, 10-32, KEL-F
35 LAM 5009176043 SCREW, KEL-F, FHSL, 6-32 X 5/8
36 LAM 5009176048 CAP, THREADED, FEMALE, KEL-F, #3/8-16
37 LAM 5009176056 GASKET, TEFLON
38 LAM 5009200001 COVER, SCREW, ELECTRODE, LOWER
39 LAM 515-093894-001 O-RING
40 LAM 600-000134-001 ASSY., CLAMP, RETAINER, &, PLUNGER
41 LAM 6005000003 KIT, PLUNGER ASSEMBLY, KEL-F
42 LAM 6005000009 KIT, PLUNGER, CERAMIC
43 LAM 6005000010 PUCKS, ALIGNMENT
44 LAM 6005000011 ASSY, PUCK, ALIGNMENT, 11"
45 LAM 6005000016 KIT, PM, PLUNGER, 9600
46 LAM 6005000019 KIT, CLEAN, CHAMBER, 9600
47 LAM 6005000031 KIT, PLUNGER, LONG, KEL-F
48 LAM 6005000046 ASSY, LIFT PIN, CARTRIDGE
49 LAM 6005000047 KIT, PM, RAINBOW, MODEL 4528
50 LAM 602120 ASSEMBLY, PIN, LIFT, WAFER
51 LAM 602258 SCREW, SHOULDER
52 LAM 601124 BAFFLE
53 LAM 601179 BAFFLE PLATE
54 LAM 601187 PLATE-DIFF, ANOD (100, 125, 150MM)
55 LAM 601224 DIFFUSER PLATE
56 LAM 602250 BAFFLE PLATE TOP
57 LAM 6150000015 KIT, SUB-ASSY., PM, ELECTRODE & LIFTER, LOWER
58 LAM 6150000018 KIT, SUB-ASSY., PM, HOUSING, CHAMBER, LOWER
59 LAM 6150000020 KIT, SUB-ASSY., PM, SPINNER, LIFTER
60 LAM 645-000217-001 MICRO SWITCH#311SM706-T
61 LAM 660-024637-026 RFDS
62 LAM 676-000504-003 MOTOR 12 VDC
63 LAM 713-000032-001 BUSHING, VESPEL, LARGE
64 LAM 713-000032-002 BUSHING, VESPEL, SMALL
65 LAM 713-002870-001 SLIT, bbbbbb, END POINT, TEFLON
66 LAM 713-004108-001 ANODE PLUG
67 LAM 713-008060-001 GAS FEED STANDOFF
68 LAM 713-011545-002 GUIDE, SPRING
69 LAM 713-011546-002 SLEEVE, PLUNGER GUIDE
70 LAM 713-011548-001 SLEEVE, PLUNGER GUIDE
71 LAM 713-011558-001 RING, ELECTRODE INSULATOR
72 LAM 713-011560-001 RING, SHROUD
73 LAM 713-011574-001 PLUNGER, WAFER CLAMP
74 LAM 713-011575-001 NUT, RETAINER
75 LAM 713-011576-001 ALIGNMENT PIN, CLAMP
76 LAM 713-011577-001 WASHER, CLAMP RETAINING
77 LAM 713-011578-001 SLEEVE, PLUNGER GUIDE
78 LAM 713-011578-003 SLEEVE, PLUNGER GUIDE
79 LAM 713-011579-001 GUIDE, PLUNGER
80 LAM 713-011584-001 PLUNGER, WAFER CLAMP
81 LAM 713-011585-001 COVER, CLAMP BOLT
82 LAM 713-011585-004 INSERT, TEFLON
83 LAM 713-011592-001 WASHER, KEL-F, O.D., -0.625, I.D. -0.200
84 LAM 713-011592-002 WASHER, KEL-F, O.D., -0.625, I.D. -0.240
85 LAM 713-011650-006 RING, FOCUS COMBO
86 LAM 713-011752-001 INSERT, 6-32 THREAD
87 LAM 713-011760-001 WASHER, EDGE, FOCUS, RING
88 LAM 713-011803-002 RING, ELECTRODE CLAMP
89 LAM 713-011926-001 CAP, BOLT ELEC.
90 LAM 713-011928-001 CAP BOLT ELECTRODE
91 LAM 713-011980-001 HOUSING, PLUNGER
92 LAM 713-018426-369 INSERT, VESPEL 6"
93 LAM 713-020801-001 SHLD, WATER, HEADLOAD AXIS
94 LAM 713-020911-102 PLUNGER, WAFER CLAMP, UPPER
95 LAM 713-021267-001 CLAMP, PIN HEAD
96 LAM 713-021268-001 CLAMP, PIN BASE
97 LAM 713-021310-001 bbbbbb P.S. MODULE
98 LAM 713-022442-001 LID, ENCLOSURE
99 LAM 713-022446-001 SHIELD SPLASH INNER
100 LAM 713-022447-001 SHIELD SPLASH OUTER
101 LAM 713-023568-001 LIP ENCLOSURE LID
102 LAM 713-023665-001 LID DRIP PAN
103 LAM 713-028281-001 CONFINEMENT RING
104 LAM 713-028485-001 BOLT, ELECTRODE RING CLAMP, KEL-F
105 LAM 713-028487-001 RING, CONFINEMENT, VESPEL
106 LAM 713-028553-001 CONFINEMENT RING
107 LAM 713-028553-002 CONFINEMENT RING
108 LAM 713-028553-103 RING, CONFINEMENT, VESPEL
109 LAM 713-098661-001 SLOTTED PAN
110 LAM 713-140214-001 GUIDE PIN, REV A
111 LAM 713-140214-001-A GUIDE PIN, REV A
112 LAM 713-140397-004 PIN, LOWER ELECTRODE, 6" 10-32 UNF
113 LAM 713-140397-005 PIN, LOWER ELECTRODE
114 LAM 713-140434-001 PIN, INDEX, RING, QTZ.
115 LAM 713-250585-001 HSG, ISOLATOR, RF
116 LAM 713-330153-003 Rod, Adjustable, Clamping, Vespel, 9600
117 LAM 713-330166-002 COVER, ROD, CLAMPING, B.A.C 9600
118 LAM 713-330311-001 CLIP, B.A.C, 9600
119 LAM 713-540183-002 BUSHING, LOWER, PEEK
120 LAM 713-540184-002 BUSHING, UPPER, PEEK
121 LAM 714-330982-001 2 MIL HARD ANODIZE WITH SEALANT
122 LAM 714-460562-002 COVER ELECTRODE HOUSEING, ESC
123 LAM 714-704612-001 LINER, CROSSBAR
124 LAM 715-000743-001 MOUNT GEAR CAP
125 LAM 715-001147-002 KEY, 1/8" SQ. X 0.75" LG.
126 LAM 715-001147-006 KEY, 1/8" SQ. X 3.00" LG.
127 LAM 715-001408-001 ELECTRODE, UPPER
128 LAM 715-001408-003 ELECTRODE, UPPER
129 LAM 715-002007-001 REACTOR HINGE PIN 715-02007-1
130 LAM 715-002206-001 RING, CLAMP ELECTRODE
131 LAM 715-004042-001 ELECTRODE 8"
132 LAM 715-004042-002 ELECTRODE, LOWER
133 LAM 715-004042-003 ELECTRODE, LOWER
134 LAM 715-004042-004 ELECTRODE, LOWER
135 LAM 715-005153-001 SEAL PLATE, REAR
136 LAM 715-005213-001 FOUR PIN LIFTER REPAIR
137 LAM 715-005844-001 RING, ORIFICE
138 LAM 715-005965-001 SEAL PLATE, FRONT
139 LAM 715-006213-001 FOUR PIN LIFTER FLANGE
140 LAM 715-006362-006 SCREW #8 ANODIZED
141 LAM 715-006389-001 SPACER CHAMBER
142 LAM 715-006436-001 BARRIER ION ANODIZED
143 LAM 715-006681-001 BAFFLE, LOWER
144 LAM 715-006719-001 PLATE, SEAL
145 LAM 715-007025-001 ELECTRODE, UPPER
146 LAM 715-007172-001 THREADED FLANGE CLAMP
147 LAM 715-007172-002 FLANGE CLAMP
148 LAM 715-007413-001 FOUR PIN LIFTER
149 LAM 715-007434-001 INSERT GAP HOUSING
150 LAM 715-007435-001 QUAD SEAL RING
151 LAM 715-007469-001 ELECRODE, LOWER (4-PIN)
152 LAM 715-007469-002 ANODE 3 MILS HARD ANODIZED
153 LAM 715-007469-101 ELECTRODE, LOWER (4-PIN)
154 LAM 715-007469-102 LOWER ELECTRODE
155 LAM 715-007999-002 ELECTRODE, LOWER (4-PIN)
156 LAM 715-008079-001 ELECTRODE AL. 5 MIL ANODIZE
157 LAM 715-008331-001 FILTER
158 LAM 715-008369-001 LIFTER, WAFER 4-PIN (0.082)
159 LAM 715-008721-001 ELECTRODE, ALUM.
160 LAM 715-008721-001-R ELECTRODE, ALUM, RADIUS EDGE
161 LAM 715-008763-001 BAFFLE, UPPER
162 LAM 715-009161-001 LIFTER, 4 PIN
163 LAM 715-009306-004 RING, FOCUS OUTER, ALUM.
164 LAM 715-009306-005 FOCUS RING 5"
165 LAM 715-009306-006 RING, FOCUS ANODIZED
166 LAM 715-009306-006 Ring, Focus, Aluminum, 6", 490
167 LAM 715-009306-006 Ring, Focus, Ceramic, 6", 490
168 LAM 715-009345-001 LOWER SEAL PLATE
169 LAM 715-009360-006 FOCUS RING 715-00936-006
170 LAM 715-009394-001 ELECTRODE, UPPER
171 LAM 715-009583-001 ENTRANCE AND EXIT LIFTER
172 LAM 715-009657-001 RING, EDGE, ANODIZED
173 LAM 715-009777-001 CAP, ELECTRODE
174 LAM 715-009777-002 CAP, ELECTRODE
175 LAM 715-009778-001 CAP, ELECTRODE
176 LAM 715-009778-002 CAP, ELECTRODE
177 LAM 715-009779-001 ELECTRODE, LOWER (4-PIN)
178 LAM 715-009779-002 ELECTRODE, LOWER (4-PIN)
179 LAM 715-009827-001 RING, FOCUS INNER, ALUM.
180 LAM 715-009828-001 RING, EDGE 5"
181 LAM 715-011116-002 SLEEVE, NUT, ADJUST
182 LAM 715-011148-002 ASSY, ARM, TENSIONER, CHAIN
183 LAM 715-011148-002 Arm, Tensioner, Chain
184 LAM 715-011148-002 Arm, Tensioner, Chain, Pin
185 LAM 715-011148-002(A) ARM, TENSIONER, CHAIN
186 LAM 715-011148-002(B) ARM, TENSIONER, CHAIN, PIN
187 LAM 715-011502-001 RING, UPPER COOLING
188 LAM 715-011531-002 ELECTRODE ALUM. ANODIZED
189 LAM 715-011531-008 ELECTRODE ALUM. ANODIZED
190 LAM 715-011531-009 ELECTRODE ALUM. ANODIZED
191 LAM 715-011531-011 ELECTRODE, UPPER
192 LAM 715-011531-012 ELECTRODE, UPPER
193 LAM 715-011531-014 ELECTRODE ALUM. ANODIZED
194 LAM 715-011531-015 ELECTRODE ALUM. ANODIZED
195 LAM 715-011531-102 ELECTRODE ALUM. ANODIZED
196 LAM 715-011532-001 SEAL PLATE
197 LAM 715-011535-001 RING ELECTRODE CLAMP
198 LAM 715-011559-262 CLAMP
199 LAM 715-011563-161 CLAMP, WAFER, DOMED, CERAMIC, 6", 1-FLAT, 4500
200 LAM 715-011565-001 BOLT, CLAMP
201 LAM 715-011565-002 BOLT, CLAMP RETAINING
202 LAM 715-011622-001 LIFTER WAFER 4 - PIN
203 LAM 715-011622-101 LIFTER, WAFER, 4 PIN, FLEXIBLE
204 LAM 715-011629-006 CAP, ELECTRODE, FLAT
205 LAM 715-011629-008 ELECTRODE, LOWER
206 LAM 715-011640-001 RING, FOCUS, LOWER
207 LAM 715-011640-004 RING, FOCUS ANODIZED 4"
208 LAM 715-011640-005 FOCUS RING, ANODIZED
209 LAM 715-011640-006 RING, FOCUS
210 LAM 715-011640-008 FOCUS RING, ANODIZED
211 LAM 715-011664-006 CAP,LOWER ELECTRODE 6"
212 LAM 715-011665-006 LOWER, ELECTRODE, CAP W/VENT GROOVE
213 LAM 715-011673-006 CAP, LOWER ELECTRODE 6"
214 LAM 715-011673-105 CAP, LOWER ELECTRODE
215 LAM 715-011673-106 CAP, LOWER ELECTRODE 6"
216 LAM 715-011746-141 Plate Wafer Clamp 4"
217 LAM 715-011746-151 PLATE 5" .020 DOME REDUCED HEAT
218 LAM 715-011746-156 PLATE, WAFER CLAMP
219 LAM 715-011746-161 PLATE, WAFER CLAMP
220 LAM 715-011749-005 EDGE RING, 5" WAFER CLAMP
221 LAM 715-011749-006 EDGE RING, ANODIZED
222 LAM 715-011753-001 PLATE, BAFFLE, UPPER 6"
223 LAM 715-011754-001 BAFFLE
224 LAM 715-011912-083 BAFFLE, UPPER
225 LAM 715-011913-080 BAFFLE, LOWER
226 LAM 715-011913-083 BAFFLE, LOWER
227 LAM 715-011913-501 BAFFLE, LOWER
228 LAM 715-011925-001 BOLT, CAPPED, CLAMPED RETAINING
229 LAM 715-011927-001 BOLT CAPPED ELECTRODE RETAINING
230 LAM 715-011982-001 CAP, PLUNGER, HOUSING LOWER
231 LAM 715-011985-006 CAP, LOWER ELECTRODE 6" DOMED
232 LAM 715-011985-106 ELECTRODE, LOWER
233 LAM 715-011986-108 CAP, LOWER ELECTRODE
234 LAM 715-012615-001 BLOCK MOUNTING INDEXER REAR
235 LAM 715-018991-006 ELECTRODE,ALUM.ANOD.
236 LAM 715-018991-206 ELECTRODE
237 LAM 715-018991-208 UPPER ELECTRODE
238 LAM 715-021970-008 HOLDER WAFER 8"
239 LAM 715-025106-001 BAFFLE PLATE 8"
240 LAM 715-028087-005 SHROUD 6" HARD ANODIZE
241 LAM 715-028087-101 SHROUD
242 LAM 715-028305-001 CLAMP RETAINER, 1 TURN
243 LAM 715-028408-100 ELECTRODE, UPPER bbbbL
244 LAM 715-028486-002 PLATE, UPPER SEAL 6" ELECT
245 LAM 715-028559-001 SHOWER HEAD 6"
246 LAM 715-028606-161 Wafer Clamp 6"
247 LAM 715-028626-002 BAFFLE, UPPER
248 LAM 715-028627-003 BAFFLE, LOWER
249 LAM 715-030136-003 R, EDGE, ESC, 6", FLAT, 4420
250 LAM 715-030320-001 BSR Injection Ring
251 LAM 715-031752-205 CAP, LWR ELECT. 5" DOME .020
252 LAM 715-031752-206 ELECTRODE, LOWER CAP
253 LAM 715-031752-208 CAP LOWER ELECTRODE
254 LAM 715-033098-001 GAS RING
255 LAM 715-07469-002 Electrode, Al.
